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Published online by Cambridge University Press: 01 February 2011
To expand the utility of p+ mesoporous silicon devices in proteomic biosensor applications, we have conducted in-depth studies to quantify the impact of employing a strong base post etch process to modify the microstructure of microcavity sensors tuned to operate in the visible spectrum. Changes in the optical response and quality of the cavity are quantified as a function of potassium hydroxide (KOH) exposure and initial porosity. Our results show that an aqueous ethanol solution containing millimolar concentrations of KOH is an effective means not only to increase the porosity and pore size, thereby enhancing pore infiltration of large (40–50kDa) proteins, but also to fine tune the optical properties of a passive optical devices.