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Oxidation Kinetics in SrTiO3 Homoepitaxy

Published online by Cambridge University Press:  10 February 2011

X.D. Zhu
Affiliation:
Department of Physics, University of California, Davis, CA 95616
Weidong Si
Affiliation:
Department of Physics, The Penn State University, University Park, PA 16802
X.X. Xi
Affiliation:
Department of Physics, The Penn State University, University Park, PA 16802
Qidu Jiang
Affiliation:
Department of Chemistry, University of Houston, Houston, TX 77204-5641
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Abstract

Using an oblique-incidence optical reflectivity difference technique, we investigated kinetic processes in SrTiO3 homoepitaxy on SrTiO3(001) under pulsed laser deposition conditions. Depending upon growth temperature and oxygen ambient pressure, we found that the oxidation of an as-grown SrTiO3 monolayer may take a much longer time to complete than the recrystallization of the monolayer. The oxidation reaction was found to be characterized by an effective activation energy barrier of 1.35 eV and a large pre-exponential factor.

Type
Research Article
Copyright
Copyright © Materials Research Society 2000

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References

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