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Photo Chemical Modification of the ZnSe Surface

Published online by Cambridge University Press:  10 February 2011

Victor M. Stepanenko
Victor M. Stepanenko*
Affiliation:
Institute for Single Crystals, National Academy of Science of Ukraine, 60 Lenin Avn., Kharkov, 310001, Ukraine, stepan@vl.kharkov.ua
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Abstract

Photon stimulated reaction of chlorine at ZnSe surface was observed at room temperature in the photon range from 4 eV to 12 eV. Estimated quantum efficiency is about 1, depending on the photon range and gas pressure. The study of reaction products was performed with AES, XPS and SEM with Energy Dispersion Analysis. A model based on photon stimulated diffusion of dissociated gas atoms is dicussed. Comparison to C12/GaAs and XeF2/Si systems was made.Effective laser ablation of the ZnCI2 films deposited with masks was exploited for direct patterning. The ultimate resolution obtained was restricted with diffraction limit,

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 555: Symposium OO – Properties and Processing of Vapor-Deposited Coatings , 1998 , 273
Copyright
Copyright © Materials Research Society 1999

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