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Photonic-Fluidic Integrated Microstructures for Sensor and Photonic Device Applications

Published online by Cambridge University Press:  01 February 2011

Claire L. Callender ,
Patrick Dumais ,
Christopher J. Ledderhof  and
Julian P. Noad
Claire L. Callender
Affiliation:
claire.callender@crc.ca, Communications Research Centre, Broadband Network Technologies, 3701 Carling Ave,, PO Box 11490 Station H, Ottawa, K2H 8S2, Canada, 613-998-2726, 613-990-8382
Patrick Dumais
Affiliation:
patrick.dumais@crc.ca, Communications Research Centre, Ottawa, ON, K2H 8S2, Canada
Christopher J. Ledderhof
Affiliation:
chris.ledderhof@crc.ca, Communications Research Centre, Ottawa, ON, K2H 8S2, Canada
Julian P. Noad
Affiliation:
julian.noad@crc.ca, Communications Research Centre, Ottawa, ON, K2H 8S2, Canada
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Abstract

The design, fabrication and characterization of liquid-filled microchannels embedded in silica layers and integrated with optical waveguides for applications in on-chip sensors and novel photonic devices are presented. These integrated microstructures are formed using plasma-enhanced chemical vapor deposition (PECVD), photolithography and reactive ion etching (RIE). Surface accessible fluid introduction ports have been developed, and microfluidic circuits including bends, T-junctions and splitters are demonstrated. Coupling of light from integrated solid silica waveguides via directional coupling or direct end-fire coupling into fluid filled channels has been achieved on-chip, and optical losses assessed experimentally and theoretically. Optimization of the microstructures for sensor applications and for novel photonic devices based on nonlinear and other optical properties of fluids in integrated liquid waveguide segments is discussed.

Keywords

microstructureopticalsensor
Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 951: Symposium E – Nanofunctional Materials, Nanostructures and Novel Devices for Biological and Chemical Detection , 2006 , 0951-E07-13
Copyright
Copyright © Materials Research Society 2007

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References

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