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Planarization Materials for Active Matrix Thin Film Transistor Arrays

Published online by Cambridge University Press:  01 February 2011

Ahila Krishnamoorthy ,
Richard Spear ,
Amanuel Gebrebrhan ,
Mehari Stifanos ,
Hai Bien ,
Marie Lowe ,
Deborah yellowaga  and
Peter Smith
Ahila Krishnamoorthy
Affiliation:
ahila.krishnamoorthy@honeywell.com, Honeywell, Sunnyvale, CA, 94089, United States
Richard Spear
Affiliation:
richard.spear@honeywell.com, Honeywell, Sunnyvale, CA, 94089, United States
Amanuel Gebrebrhan
Affiliation:
amanuel.gebrebrhan@honeywell.com, Honeywell, Sunnyvale, CA, 94089, United States
Mehari Stifanos
Affiliation:
mehari.stifanos@honeywell.com, Honeywell, Sunnyvale, CA, 94089, United States
Hai Bien
Affiliation:
Hai.bien@honeywell.com, Honeywell, Sunnyvale, CA, 94089, United States
Marie Lowe
Affiliation:
marie.lowe@honeywell.com, Honeywell, Chandler, AZ, 85226, United States
Deborah yellowaga
Affiliation:
deb.yellowaga@honeywell.com, Honeywell, Chandler, AZ, 85226, United States
Peter Smith
Affiliation:
peter.smith@honeywell.com, Honeywell, Morristown, NJ, 07962, United States
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Abstract

Traditional plasma based dielectric films are conformal and cost-prohibitive for large displays. Solution based dielectrics are planarizing in nature and provide a flat surface for indium tin oxide (ITO) layer with the resultant uniform liquid crystal response throughout the pixel. In this paper, we present the display-related material properties and integration results obtained by using a solution-based organosilsesquioxane material. The material exhibits extremely high transmittance and planarization, low outgassing, high resistance to moisture absorption and diffusion, good adhesion to other layers integrated with it and ease of integration.

Keywords

displaypassivationfilm
Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 1030: Symposium G – Large-Area Processing and Patterning for Active Optical and Electronic Devices , 2007 , 1030-G01-07
Copyright
Copyright © Materials Research Society 2008

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References

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