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PMN-PT Single Crystal Piezo-Electric Acoustic Sensor

Published online by Cambridge University Press:  01 February 2011

Sung Q Lee ,
Hye Jin Kim ,
Sang Kyun Lee ,
Jae Woo Lee  and
Kang Ho Park
Sung Q Lee
Affiliation:
hermann@etri.re.kr, Electronics and Telecommunication Research Institute, Nano Convergence Sensor Team, 161 Gajeong-Dong, Yuseong-Gu, Daejeon, 305-350, Korea, Republic of, +82-42-860-1142, +82-42-860-5608
Hye Jin Kim
Affiliation:
nolawara@etri.re.kr, Electronics and Telecommunication Research Institute, Nano Convergence Sensor Team, 161 Gajeong-Dong, Yuseong-Gu, Daejeon, 305-350, Korea, Republic of
Sang Kyun Lee
Affiliation:
sklee526@etri.re.kr, Electronics and Telecommunication Research Institute, Nano Convergence Sensor Team, 161 Gajeong-Dong, Yuseong-Gu, Daejeon, 305-350, Korea, Republic of
Jae Woo Lee
Affiliation:
jaewoo@etri.re.kr, Electronics and Telecommunication Research Institute, Nano Convergence Sensor Team, 161 Gajeong-Dong, Yuseong-Gu, Daejeon, 305-350, Korea, Republic of
Kang Ho Park
Affiliation:
pkh@etri.re.kr, Electronics and Telecommunication Research Institute, Nano Convergence Sensor Team, 161 Gajeong-Dong, Yuseong-Gu, Daejeon, 305-350, Korea, Republic of
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Abstract

The MEMS (micro-electro-mechanical systems) microphone enables the manufacturing of small mechanical components on the surface of a silicon wafer. The MEMS microphones are less susceptible to vibration because of the smaller diaphragm mass and an excellent candidate for chip-scale packaging. In this paper, we present a piezoelectric MEMS microphone based on (1-x)Pb(Mg1/3Nb2/3)O3-xPbTiO3 (PMN-PT) single crystal diaphragm. The PMN-PT materials exhibit extremely high piezoelectric coefficients and other desirable properties for an acoustic sensor. The piezoelectric-based microphone can offer the ability to passively sense without the power requirements. In particular, this paper introduces the design of a PMN-PT single crystal diaphragm with interdigitated electrode. We were able to fabricate miniaturized PMN-PT single crystal diaphragms. The fabricated sensor exhibits the sensitivity of 1.5mV/Pa. This implies that the PMN-PT thin film microphone has a potential of excellent acoustic characteristics.

Keywords

piezoelectricacousticmicroelectro-mechanical (MEMS)
Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 1034 , 2007 , 1034-K03-46
Copyright
Copyright © Materials Research Society 2008

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