Published online by Cambridge University Press: 10 February 2011
Thin film, solid-oxide fuel cells (TFSOFCs) synthesized from an electrolyte and conductive material are developed using photolithographic patterning and physical vapor deposition. The anode layer must enable combination of the reactive gases, be conductive to pass the electric current, and provide mechanical support to the electrolyte and cathode layers. The microstructure and morphology desired for the anode layer should facilitate generation of maximum current density from the fuel cell. For these purposes, the parameters of the deposition process and post-deposition patterning are developed to optimize a continuous porosity across the anode layer. The anode microstructure is characterized using scanning electron microscopy and the power ouput generated through current-voltage measurement.