Hostname: page-component-78c5997874-mlc7c Total loading time: 0 Render date: 2024-11-13T00:57:05.818Z Has data issue: false hasContentIssue false
  • English
  • Français

Position Controlled Growth in Carbon Nanotubes Catalyzed by an Iron Nano-dot Array

Published online by Cambridge University Press:  01 February 2011

Jun-ichi Fujita ,
Takahito Mukawa ,
Satoshi Okada ,
Ryota Kobayashi ,
Masahiko Ishida ,
Toshinari Ichihashi ,
Yukinori Ochiai  and
Shinji Matsui
Jun-ichi Fujita
Affiliation:
fujita@bk.tsukuba.ac.jp, University of Tsukuba, Institute of Applied Physics, 1-1-1 Tennodai, Tsukuba, N/A, 305-8573, Japan, +81-29-853-5302, +81-29-853-5302
Takahito Mukawa
Affiliation:
bk200101493@s.bk.tsukuba.ac.jp, University of Tsukuba, Institute of Applied Physics, Japan
Satoshi Okada
Affiliation:
bk200001407@s.bk.tsukuba.ac.jp, University of Tsukuba, Institute of Applied Physics
Ryota Kobayashi
Affiliation:
bk200101430@s.bk.tsukuba.ac.jp
Masahiko Ishida
Affiliation:
ishida@ah.jp.nec.com, NEC Corporation, Fundamental Research Laboratories
Toshinari Ichihashi
Affiliation:
ichihasi@frl.cl.nec.co.jp, NEC Corporation, Fundamental Research Laboratories
Yukinori Ochiai
Affiliation:
ochiai@cw.jp.nec.com, NEC Corporation, Fundamental Research Laboratories
Shinji Matsui
Affiliation:
matsui@lasti.u-hyogo.ac.jp, University of Hyoho, LASTI
Get access

Abstract

We report a successful demonstration of a position control technique for carbon nanotube growth catalyzed by an iron nano-dot array, which was fabricated by using electron beam induced chemical vapor deposition (EB-CVD). Point irradiation of an electron beam with ferrocene source gas produced an amorphous carbon dot containing iron atoms that were uniformly dispersed into each dot, and its position could be precisely controlled. Vacuum annealing of the ferrocene based dots induced segregation of iron nano-particles, whose size was almost proportional to the beam irradiation time. After removing the carbon residue, an ethanol CVD process carried out at 800°C under 40 mmHg of ethanol vapor induced carbon nanotube growth from the dots. Many grown nanotubes were very thin, being 0.7 to 1.8 nm in diameter. These diameters were much less than that of the bottom iron particles.

Keywords

electron irradiationcatalyticnanostructure
Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 900: Symposium O – Nanoparticles and Nanostructures in Sensors and Catalysis , 2005 , 0900-O09-03
Copyright
Copyright © Materials Research Society 2006

Access options

Get access to the full version of this content by using one of the access options below. (Log in options will check for institutional or personal access. Content may require purchase if you do not have access.)

References

REFERENCES

[1] Iijima, S.: Nature 56 (1991) 354.Google Scholar
[2] Kong, J., Soh, H. T., Cassell, A., Quate, C. F. and Dai, Hongjie, Nature, 395(1998) 878.Google Scholar
[3] Ishida, M., Hongo, H., Nihey, F., Ochiai, Y.: Jpn. J. Appl. Phys. 43 (2004) L1356.Google Scholar
[4] Li, Y., Kim, W., Zhang, Y., Rolandi, M., Wang, D. and Dai, H.,J. Phys. Chem., 105(2001)11424.Google Scholar
[6] Maruyama, S., Kojima, R., Miyauchi, Y., Chiashi, S., and Kohno, M.: Chem. Phys. Lett. 360 (2002) 229.Google Scholar
[5] Fujita, J., Ishida, M., Ichihashi, T., Ochiai, Y., Kaito, T., Matsui, S.: J. Vac. Sci. Technol. B 21 (2003) 2990.Google Scholar
[6] Fujita, J., Ishida, M., Ichihashi, T., Ochiai, Y., Kaito, T., and Matsui, S., Jpn. J. Appl. Phys., 43 (2004) 3799.Google Scholar
[7] Koops, H. W. P., Kretz, J., Rudolph, M, Weber, M., Dahm, G., and Lee, K. L.: Jpn. J. Appl. Phys. 33 (1994) 7099.Google Scholar
[8] Broers, A. N., Molzen, W. W., Cuomo, J. J., and Wittels, N. D.: Appl. Phys. Lett. 29 (1976) 596.Google Scholar
[9] Ichihashi, T., Fujita, J., Ishida, M., and Ochiai, Y., Phys. Rev. Lett., 92 (2004) 215702–1.Google Scholar