Hostname: page-component-745bb68f8f-cphqk Total loading time: 0 Render date: 2025-01-29T23:57:51.620Z Has data issue: false hasContentIssue false
  • English
  • Français

Preparation of PbTiO3-Pb(Mg0.5W0.5)O3 Thin Films Using Pulsed Laser Deposition

Published online by Cambridge University Press:  01 January 1992

B. W. Lee ,
H. M. Lee ,
L. P. Cook ,
P. K. Schenck ,
A. Paul ,
W. Wong-ng ,
C. K. Chiang ,
P. S. Brody ,
B. J. Rod  and
K. W. Bennett
B. W. Lee
Affiliation:
National Institute of Standards and Technology, Gaithersburg, MD. Guest Scientist from Hanyang University, Seoul, Korea.
H. M. Lee
Affiliation:
National Institute of Standards and Technology, Gaithersburg, MD. University of Maryland, College Park, MD.
L. P. Cook
Affiliation:
National Institute of Standards and Technology, Gaithersburg, MD.
P. K. Schenck
Affiliation:
National Institute of Standards and Technology, Gaithersburg, MD.
A. Paul
Affiliation:
National Institute of Standards and Technology, Gaithersburg, MD.
W. Wong-ng
Affiliation:
National Institute of Standards and Technology, Gaithersburg, MD.
C. K. Chiang
Affiliation:
National Institute of Standards and Technology, Gaithersburg, MD.
P. S. Brody
Affiliation:
U.S. Army Research Laboratory, Adelphi, MD.
B. J. Rod
Affiliation:
U.S. Army Research Laboratory, Adelphi, MD.
K. W. Bennett
Affiliation:
U.S. Army Research Laboratory, Adelphi, MD.
Get access

Abstract

Thepreparation of modified lead titanate (0.PbTiO3-Pb(Mg0.5W0.5)O3) thin films by pulsed excimer laser deposition on Pt-coated Si substrates has been studied. Films were prepared with substrate temperatures of 300–650°C, and ambient oxygen pressures of 2.7–4OPa. Phase formation and morphology of the films varied according to deposition conditions. At 650°C, 40Pa, well-crystallized perovskite single phase films were obtained. Most films were ferroelectric and showed preferred orientation which could be correlated with the texture of the underlying platinum. The effect of preferred orientation on the dielectric properties of the films is discussed.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 285: Symposium I – Laser Ablation in Materials Processing–Fundamentals and Applications , 1992 , 403
Copyright
Copyright © Materials Research Society 1993

Access options

Get access to the full version of this content by using one of the access options below. (Log in options will check for institutional or personal access. Content may require purchase if you do not have access.)

References

REFERENCES

1. Geideman, W., IEEE, Trans. Ultrasonics, Ferroelectrics, and Frequency Control, 38(6), 704, (1991).Google Scholar
2. Okuyama, M. and Hamakawa, Y., Ferroelectrics, 63, 243, (1985).Google Scholar
3. Uchino, K., Aizawa, M. and Nomura, S., Ferroelectrics, 64, 199, (1985).Google Scholar
4. Saenger, K. L., Roy, R. A., Etzold, K. F., and Cuomo, J. J., in Ferroelectric Thin Films, Myers, E. R. and Kingon, A. I. eds., Mat. Res. Soc. Proc. 200, 115, (1990).Google Scholar
5. Chiang, C. K., Wong-Ng, W., Cook, L. P., Schenck, P. K., Lee, H. M., Brody, P. S., Bennett, K. W., and Rod, B. J., in Ferroelectric Thin Films II, Kingon, A.I., Myers, E. R. and Tuttle, B. eds., Mat. Res. Soc. Proc., 24W, (1992).Google Scholar
6. Ojawa, T., Senda, A. and Kasanami, T., Jpn. J. Appl. Phys. N, 2145, (1991).Google Scholar