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Preparation of Titanium Carbonitride Coatings by the Sol-Gel Process

Published online by Cambridge University Press:  25 February 2011

Haixing Zheng ,
Kris Oka  and
John D. Mackenzie
Haixing Zheng
Affiliation:
Department of Materials Science and Engineering, University of California at Los Angeles, 405 Hilgard Ave., Los Angeles, CA 90024.
Kris Oka
Affiliation:
Department of Materials Science and Engineering, University of California at Los Angeles, 405 Hilgard Ave., Los Angeles, CA 90024.
John D. Mackenzie
Affiliation:
Department of Materials Science and Engineering, University of California at Los Angeles, 405 Hilgard Ave., Los Angeles, CA 90024.
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Abstract

Ti(NPri2)4 has been synthesized and used as a precursor for aminolysis andpolymerization by reaction with isopropylamine. The resultant dark red solution was utilized for dip coating of silicon substrates. Firing of these coatings in N2 or Ar produced dense and crack-free titanium carbonitride coatings.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 271: Symposium N – Better Ceramics Through Chemistry V , 1992 , 893
Copyright
Copyright © Materials Research Society 1992

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References

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