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Principal Pilot Line Manufacturing Challenges and Solutions in Direct Fabrication of a-Si:H TFT Arrays on Flexible Substrates

Published online by Cambridge University Press:  01 February 2011

Shawn M. O¡¯Rourke ,
Douglas E. Loy ,
Curt Moyer ,
Scott K. Ageno ,
Barry P. O'Brien ,
Edward J. Bawolek ,
Dirk Bottesch ,
Michael Marrs ,
Jeff Dailey  and
Rita Cordova
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Shawn M. O¡¯Rourke
Affiliation:
shawn.m.orourke@asu.edu, Arizona State University, Flexible Display Center, 7700 S. River Parkway, ASU Research Park, Tempe, AZ, 85287-0808, United States
Douglas E. Loy
Affiliation:
doug.loy@asu.edu, Arizona State University, Flexible Display Center, 7700 S. River Parkway, ASU Research Park, Tempe, AZ, 85287-0808, United States
Curt Moyer
Affiliation:
curt.moyer@asu.edu, Arizona State University, Flexible Display Center, 7700 S. River Parkway, ASU Research Park, Tempe, AZ, 85287-0808, United States
Scott K. Ageno
Affiliation:
scott.ageno@asu.edu, Arizona State University, Flexible Display Center, 7700 S. River Parkway, ASU Research Park, Tempe, AZ, 85287-0808, United States
Barry P. O'Brien
Affiliation:
barry.obrien@asu.edu, Arizona State University, Flexible Display Center, 7700 S. River Parkway, ASU Research Park, Tempe, AZ, 85287-0808, United States
Edward J. Bawolek
Affiliation:
Ed.Bawolek@asu.edu, Arizona State University, Flexible Display Center, 7700 S. River Parkway, ASU Research Park, Tempe, AZ, 85287-0808, United States
Dirk Bottesch
Affiliation:
Dirk.Bottesch@asu.edu, Arizona State University, Flexible Display Center, 7700 S. River Parkway, ASU Research Park, Tempe, AZ, 85287-0808, United States
Michael Marrs
Affiliation:
michael.marrs@asu.edu, Arizona State University, Flexible Display Center, 7700 S. River Parkway, ASU Research Park, Tempe, AZ, 85287-0808, United States
Jeff Dailey
Affiliation:
jeff.dailey@asu.edu, Arizona State University, Flexible Display Center, 7700 S. River Parkway, ASU Research Park, Tempe, AZ, 85287-0808, United States
Rita Cordova
Affiliation:
rita.cordova@asu.edu, Arizona State University, Flexible Display Center, 7700 S. River Parkway, ASU Research Park, Tempe, AZ, 85287-0808, United States
Jovan Trujillo
Affiliation:
jovan.trujillo@asu.edu, Arizona State University, Flexible Display Center, 7700 S. River Parkway, ASU Research Park, Tempe, AZ, 85287-0808, United States
Jann Kaminski
Affiliation:
jann.kaminski@asu.edu, Arizona State University, Flexible Display Center, 7700 S. River Parkway, ASU Research Park, Tempe, AZ, 85287-0808, United States
David R. Allee
Affiliation:
david.allee@asu.edu, Arizona State University, Flexible Display Center, 7700 S. River Parkway, ASU Research Park, Tempe, AZ, 85287-0808, United States
Sameer Venugopal
Affiliation:
sameer.venugopal@asu.edu, Arizona State University, Flexible Display Center, 7700 S. River Parkway, ASU Research Park, Tempe, AZ, 85287-0808, United States
Gregory B. Raupp
Affiliation:
raupp@asu.edu, Arizona State University, Flexible Display Center, 7700 S. River Parkway, ASU Research Park, Tempe, AZ, 85287-0808, United States
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Abstract

Principal challenges to direct fabrication of high performance a-Si:H transistor arrays on flexible substrates include automated handling through bonding-debonding processes, substrate-compatible low temperature fabrication processes, management of dimensional instability of plastic substrates, and planarization and management of CTE mismatch for stainless steel foils. In collaboration with our industrial and academic partners, we have developed viable solutions to address these challenges, as described in this paper.

Keywords

displayplasma-enhanced CVD (PECVD) (deposition)amorphous
Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 1030: Symposium G – Large-Area Processing and Patterning for Active Optical and Electronic Devices , 2007 , 1030-G07-05
Copyright
Copyright © Materials Research Society 2008

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References

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