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Quantum-Sized Silicon Precipitates in Silicon-Implanted and Pulse-Annealed Silicon Dioxide Films: Photoluminescence and Structural Transformations

Published online by Cambridge University Press:  03 September 2012

I. E. Tyschenko ,
G. A. Kachurin ,
K. S. Zhuravlev ,
N. A. Pazdnikov ,
V. A. Volodin ,
A. K. Gutakovsky ,
A. F. Leier ,
H. Fröb ,
K. Leo  and
T. Böime
...Show all authors
I. E. Tyschenko
Affiliation:
Institute of Semiconductor Physics, 630090 Novosibisk, Russia
G. A. Kachurin
Affiliation:
Institute of Semiconductor Physics, 630090 Novosibisk, Russia
K. S. Zhuravlev
Affiliation:
Institute of Semiconductor Physics, 630090 Novosibisk, Russia
N. A. Pazdnikov
Affiliation:
Institute of Semiconductor Physics, 630090 Novosibisk, Russia
V. A. Volodin
Affiliation:
Institute of Semiconductor Physics, 630090 Novosibisk, Russia
A. K. Gutakovsky
Affiliation:
Institute of Semiconductor Physics, 630090 Novosibisk, Russia
A. F. Leier
Affiliation:
Institute of Semiconductor Physics, 630090 Novosibisk, Russia
H. Fröb
Affiliation:
Insitute of Applied Photophysics, Technical University of Dresden, 13 Mommsenstrasse, D-01062 Dresden, Germany
K. Leo
Affiliation:
Insitute of Applied Photophysics, Technical University of Dresden, 13 Mommsenstrasse, D-01062 Dresden, Germany
T. Böime
Affiliation:
Insitute of Applied Photophysics, Technical University of Dresden, 13 Mommsenstrasse, D-01062 Dresden, Germany
L. Rebohle
Affiliation:
Institute of Ion Beam Physics and Materials Research, Research Centre Rossendorf, Inc.POB 510119, D-01314 Dresden, Germany
R. A. Yankov
Affiliation:
Institute of Ion Beam Physics and Materials Research, Research Centre Rossendorf, Inc.POB 510119, D-01314 Dresden, Germany
W. Skorupa
Affiliation:
Institute of Ion Beam Physics and Materials Research, Research Centre Rossendorf, Inc.POB 510119, D-01314 Dresden, Germany
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Abstract

Strong blue, red and near-infrared photoluminescence has been observed from Si+-implanted and pulse-annealed SiO2 layers. Raman scattering and high-resolution electron microscopy analyses have revealed a correlation between the structure of the Si inclusions in the SiO2 matrix and the photoluminescence. Structural transformations in the Si-rich SiO2 layers during pulse and furnace annealing have been discussed in terms of the changes in the light emission observed experimentally. Small Si clusters, non-crystalline inclusions and nanocrystals are believed to be the light sources. The blue, red and near-infrared photoluminescence is associated with small complexes of excess Si atoms, non-crystalline Si nanoinclusions and quantum-confined Si nanocrystals, respectively.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 438: Symposium A – Materials Modificaton and Synthesis by Ion Beam… , 1996 , 453
Copyright
Copyright © Materials Research Society 1997

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References

1. Canham, L.T., Appl. Phys. Lett. 57, 1046 (1990).Google Scholar
2. Mutti, P., Ghislotti, G., Bertoni, S., Bonoldi, L., Cerofolini, G.F., Meda, L., Griffi, E., Guzzi, M., Appl. Phys. Lett. 66, 851 (1995).Google Scholar
3. Shimizu-Iwayama, T., Terao, Y., Kamiya, A., Takeda, M., Nakao, S., Saitoh, K., Nucl. Instrum. Meth. B112, 214 (1996).Google Scholar
4. Skorupa, W., Yankov, R.A., Tyschenko, I.E., Fröb, H., Bohme, T., Leo, K., Appl. Phys. Lett. 68, 2410 (1996).Google Scholar
5. Hartstein, A., Tsang, J.C., Maria, D.J. Di, Dong, D.W., Appi. Phys. Lett. 36, 836 (1980).Google Scholar
6. Liao, L.-Sh., Bao, X.-M., Li, N.-Sh., Zheng, X.-Q., Min, N.-B., J. Luminescene 68, 199 (1996).Google Scholar
7. Skorupa, W., Yankov, R.A., Rebohle, L., Fröb, H., Böhme, T., Leo, K.,Tyschenko, I.E., Kachurin, G.A., Nucl. Instrum. Meth. B (1996) (in press).Google Scholar
8. Pio, F., Guzzi, M., Spinolo, G., Martini, M., Phys. Stat. Sol. (a) 159, 577 (1990).Google Scholar
9. AKachurin, G., Tyschenko, I.E., Zhuravlev, K.S., Pasdnikov, N.A., Volodin, V.A., Gutakovsky, A.K., Leier, A.F., Skorupa, W., Yankov, R.A., Nucl. Instrum. Meth. B (1996) (in press).Google Scholar