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RBS, XRD, Raman and AFM Studies of Microwave Synthesized Ge Nanocrystals

Published online by Cambridge University Press:  12 July 2011

N Srinivasa Rao ,
A P Pathak ,
G Devaraju ,
V Saikiran  and
S V S Nageswara Rao
N Srinivasa Rao
Affiliation:
School of Physics, University of Hyderabad, Central University (P.O), Hyderabad 500 046, India.
A P Pathak*
Affiliation:
School of Physics, University of Hyderabad, Central University (P.O), Hyderabad 500 046, India.
G Devaraju
Affiliation:
School of Physics, University of Hyderabad, Central University (P.O), Hyderabad 500 046, India.
V Saikiran
Affiliation:
School of Physics, University of Hyderabad, Central University (P.O), Hyderabad 500 046, India.
S V S Nageswara Rao
Affiliation:
School of Physics, University of Hyderabad, Central University (P.O), Hyderabad 500 046, India.
*
*Corresponding author E-mail: appsp@uohyd.ernet.in Tel: +91-40-23010181/23134316, Fax: +91-40-23010181 / 23010227.
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Abstract

Ge nanocrystals embedded in silica matrix have been synthesized on Si substrate by co-sputtering of SiO2 and Ge using RF magnetron sputtering technique. The as-deposited films were subjected to microwave annealing at 800 and 9000C. Rutherford backscattering spectrometry (RBS) has been used to measure the Ge composition and film thickness. The structural characterization was performed by using X-ray diffraction (XRD) and Raman spectrometry. XRD measurements confirmed the formation of Ge nanocrystals. Raman scattering spectra showed a peak of Ge-Ge vibrational mode around 299 cm−1, which was caused by quantum confinement of phonons in the Ge nanocrystals. Surface morphology of the samples was studied by atomic force microscopy (AFM). Variation of nanocrystal size with annealing temperature has been discussed. Advantages of microwave annealing are explained in detail.

Keywords

nanostructuremicrowave heatingGe
Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 1354: Symposium II – Ion Beams—New Applications from Mesoscale to Nanoscale , 2011 , mrss11-1354-ii07-07
Copyright
Copyright © Materials Research Society 2011

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References

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