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Real-Time Femtosecond Ellipsometry of SixGe1−x Epilayers

Published online by Cambridge University Press:  25 February 2011

H. R. Choo ,
M. C. Downer  and
V. P. Kesan
H. R. Choo
Affiliation:
Department of Physics, University of Texas at Austin, Austin, TX 78712
M. C. Downer
Affiliation:
Department of Physics, University of Texas at Austin, Austin, TX 78712
V. P. Kesan
Affiliation:
IBM Thomas J.Watson Research Center, Yorktown Heights, NY 10598
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Abstract

We have developed a femtosecond ellipsometer by incorporating ellipsometric probe optics into a rapid scan femtosecond pump-and-probe experiment. The system allows near real-time display of the photo-induced reflectivity changes and provides complete characterization of the time-varying dielectric function. This ellipsometer is used ex situ to characterize the femtosecond response of relaxed, MBE-grown SixGe1−x alloys over the complete composition range. The results show. that the femtosecond response depends strongly on alloy composition in optically thick samples. Ge-like samples (x<0.37) show a characteristic two-component response which may be caused by intervalley L →Γ hole scattering and impact ionization. For a given alloy composition, the presence of interfacial strain or surface oxidation strongly alter the femtosecond response.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 263: Symposium F – Mechanisms of Heteroepitaxial Growth , 1992 , 317
Copyright
Copyright © Materials Research Society 1992

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References

REFERENCES

1. Aspnes, D. E., Quinn, W. E., and Gregory, S., Appl. Phys. Lett. 51, 2707 (1990).Google Scholar
2. Cho, G. C., Kutt, W., and Kurz, H., Phys. Rev. Lett. 65,764 (1990); A. Esser, W. Kutt, M. Strahnen, G. Maidon and H. Kurz, Appl. Surf. Sci. 4M, 446 (1990).Google Scholar
3. Strahnen, M., Kutt, W. and Kurz, H., in VME-bus in Research: Proceedings of an Intemational Conference, Zurich, Switzerland, edited by Eck, C. and Parkman, C. (North-Holland, Amsterdam, 1988), p.69.Google Scholar
4. Eugene, J., LeGoues, F. K., Kesan, V. P., Iyer, S. S., and d'Heurle, F. M., Appl. Phys. Lett. 59, 78 (1991).Google Scholar
5. Liou, H. K., Mei, P., Gennser, U., and Yang, E. S., Appl. Phys. Lett. 59, 1200 (1991).Google Scholar
6. Azzam, R. and Bashra, N., in Ellipsometrv and Polarized Light, New York, North Holland, 1977, Chapter 3.Google Scholar