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Reversible and Irreversible Contributions to the Polarization in SrBi2Ta2O9 Ferroelectric Capacitors

Published online by Cambridge University Press:  10 February 2011

O. Lohse ,
D. Bolten ,
M. Grossmann ,
R. Waser ,
W. Hartner  and
G. Schindler
O. Lohse
Affiliation:
Institut für Werkstoffe der Elektrotechnik, RWTH Aachen D-52056 Aachen, Federal Republic of Germany
D. Bolten
Affiliation:
Institut für Werkstoffe der Elektrotechnik, RWTH Aachen D-52056 Aachen, Federal Republic of Germany
M. Grossmann
Affiliation:
Institut für Werkstoffe der Elektrotechnik, RWTH Aachen D-52056 Aachen, Federal Republic of Germany
R. Waser
Affiliation:
Institut für Werkstoffe der Elektrotechnik, RWTH Aachen D-52056 Aachen, Federal Republic of Germany
W. Hartner
Affiliation:
Siemens AG, Semiconductor Group, Dept HL MP E TF D-81738 Munich, Germany
G. Schindler
Affiliation:
Siemens AG, Semiconductor Group, Dept HL MP E TF D-81738 Munich, Germany
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Abstract

This work presents a survey of the mechanisms of the polarization in ferroelectric thin films which are relevant for application in non-volatile ferroelectric memories (FeRAM). Since the integration of these materials in new memory generations requires small structures and therefore a maximum utilization of the switchable polarization, the distinction between the several polarization mechanisms is of specific interest. Standard characterization methods, such as hysteresis loops, C-V measurements and fast pulse switching tests are evaluated and used to distinguish between the reversible and irreversible contributions to the total polarization. The respective contributions are described qualitatively and demonstrated at spin-coated SrBiTa2O9 thin films and compared with Pb(Zr,Ti)O3 films. Additionally, a method is described to obtain the static hysteresis curve, a precise characterization of the polarization which does not depend on the measuring frequency. These data are compared with C-V measurements. It is shown that the standard dynamic hysteresis curve reveals misleading statements about the remanent polarization and the coercive voltage.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 493: Symposium U – Ferroelectric Thin Film VI , 1997 , 267
Copyright
Copyright © Materials Research Society 1998

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References

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