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Rheed Studies of a-Axis Oriented DyBa2Cu3O7 Films Grown by All-MBE

Published online by Cambridge University Press:  10 February 2011

Ivan Bozovic ,
J. N. Eckstein ,
Natasha Bozovic  and
J. O'Donnell
Ivan Bozovic
Affiliation:
Varian Research Center, Palo Alto, CA 94304-1025
J. N. Eckstein
Affiliation:
Varian Research Center, Palo Alto, CA 94304-1025 Department of Physics, University of Illinois, Urbana-Champaign, IL 61801
Natasha Bozovic
Affiliation:
Department of Mathematics and Computer Science, San Jose State University, San Jose, CA 95192
J. O'Donnell
Affiliation:
Department of Physics, University of Illinois, Urbana-Champaign, IL 61801
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Abstract

Real-time, in-situ surface monitoring by reflection high-energy electron diffraction (RHEED) has been the key enabling component of atomic-layer-by-layer molecular beam epitaxy (ALL-MBE) of complex oxides. RHEED patterns contain information on crystallographic arrangements and long range order on the surface; this can be made quantitative with help of numerical simulations. The dynamics of RHEED patterns and intensities reveal a variety of phenomena such as nucleation and dissolution of secondary-phase precipitates, switching between growth modes (layer-by-layer, step-flow), surface phase transitions (surface reconstruction, roughening, and even phase transitions induced by the electron beam itself), etc. Some of these phenomena are illustrated here, using as a case study our recent growth of atomically smooth a-axis oriented DyBa2Cu3O7 films.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 502: Symposium II – In Situ Process Diagnostics & Intelligent Materials Processing , 1997 , 221
Copyright
Copyright © Materials Research Society 1998

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References

REFERENCES

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