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The Role of Hydrogen in Laser Deposition of Diamond-Like Carbon

Published online by Cambridge University Press:  25 February 2011

D. Thebert-Peeler ,
P.T. Murray ,
L. Petry  and
T.W. Haas
D. Thebert-Peeler
Affiliation:
Clare Boothe Luce Scholar, Graduate Materials Engineering, University of Dayton, Dayton, OH 45469
P.T. Murray
Affiliation:
University of Dayton Research Institute, University of Dayton, Dayton, OH 45469-0167
L. Petry
Affiliation:
University of Dayton Research Institute, University of Dayton, Dayton, OH 45469-0167
T.W. Haas
Affiliation:
Wright Laboratory, WL/MLBM, Wright -Patterson Air Force Base, OH 45433
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Abstract

Thin films have been grown on Si (100) substrates by pulsed laser evaporation of graphite using both IR and UV radiation. The character of the resulting film is found to be independent of the presence of H°. Diamond-like films are found to be a result of low (RT) temperature deposition of the higher energy incident particles of the UV (versus IR) laser ablation process.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 236: Symposium B – Photons and Low Energy Particles in Surface Processing , 1991 , 467
Copyright
Copyright © Materials Research Society 1992

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