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The Role of Microelectronic Integration In Environmental Control: A Perspective

Published online by Cambridge University Press:  15 February 2011

Arup Bhattacharyya
Arup Bhattacharyya*
Affiliation:
IBM Microelectronics Division,1000 River Road,Essex Junction, VT 05452
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Abstract

The paper discusses the potential of silicon-based integration of disciplines of microelectronics, microoptics, and micromechanics, (MEOM), to achieve sensor-based smart subsystems for pervasive environmental applications. The author proposes a federally-focused initiative to establish an R & D institute to expedite progress and achieve global industrial leadership.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 344: Symposium I – Materials and Processes for Environmental Protection , 1994 , 281
Copyright
Copyright © Materials Research Society 1994

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References

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