Hostname: page-component-745bb68f8f-lrblm Total loading time: 0 Render date: 2025-01-29T23:29:58.476Z Has data issue: false hasContentIssue false
  • English
  • Français

Scanning Optical Fiber Microscope for High Resolution Laser Beam Induced Current Images of Semiconductor Materials

Published online by Cambridge University Press:  25 February 2011

M. Ogura ,
M. Tajima  and
Y. Tokumaru
M. Ogura
Affiliation:
Electrotechnical Laboratory, Sakura-mura, Niihari-gun, Ibaraki 305, Japan.
M. Tajima
Affiliation:
Electrotechnical Laboratory, Sakura-mura, Niihari-gun, Ibaraki 305, Japan.
Y. Tokumaru
Affiliation:
Electrotechnical Laboratory, Sakura-mura, Niihari-gun, Ibaraki 305, Japan.
Get access

Abstract

Laser beam induced current images (LBIC) of polycrystalline silicon and liquid encapsulated Czochralski (LEC) GaAs are observed with a new scanning optical fiber microscope (SOFM), which utilizes an optical fiber as a mobile light source. In this system, fine optical probing with the beam diameter less than lm is achieved without requiring severe mechanical precision. A variety of light sources are employed to reveal different defect species. The distribution of deep levels in LEC GaAs is visualized with extrinsic photo-excitation by using a Nd:YAG laser.

Type
Articles
Information
MRS Online Proceedings Library (OPL) , Volume 69: Symposium D – Materials Characterization , 1986 , 251
Copyright
Copyright © Materials Research Society 1986

Access options

Get access to the full version of this content by using one of the access options below. (Log in options will check for institutional or personal access. Content may require purchase if you do not have access.)

References

1 Ogura, M., Sakaue, K. and Tokumaru, Y., Jpn. J. Appl. Phys. 24, L617 (1985).CrossRefGoogle Scholar
2 Tokumaru, Y. and Okada, Y., Jpn. J. Appl. Phys. 23, L64 (1984); 24, L364 (1985).CrossRefGoogle Scholar
3 Ikoma, T. and Takikawa, M., Jpn. J. Appl. Phys. 20, L591 (1981).Google Scholar
4 Ogura, M., Sakaue, K., Takagi, M., Adachi, Y. and Ikoma, T., Jpn.J.Appl.Phys., 20 L363, (1981).Google Scholar
5 Hayashi, Y.: Proc. Ist Int. Conf. Photovoltaic Sci. and Eng., Kobe (The Japan Times, LTd., Tokyo, 1984) p.513.Google Scholar