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Shadow Nanosphere Lithography: Simulation and Experiment

Published online by Cambridge University Press:  15 February 2011

Michael Giersig
Michael Giersig*
Affiliation:
Caesar Research Center Ludwig-Erhard-Allee 2 53175 Bonn Germany
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Abstract

The creation of two dimensional large-areas of nanoparticles of different morphology and ordering is still a not fully solved problem. The presented paper shows new outstanding methods based on nanosphere lithography for controlling the mask morphology to improve fabrication of nanoscales perfectly ordered over some cm2 dots, rods and rings. An annealed mask with 30nm aperatures was used for the fabrication of ferromagnetic iron nanorings. These nanosystems are expected to find various unique applications. Our method permitted fabrication of nanostructured materials with unique morphology and properties. This field is expected to open new venues in science and technology.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 879: Symposium Z – Chemistry of Nanomaterial Synthesis and Processing , 2005 , Z6.1
Copyright
Copyright © Materials Research Society 2005

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