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Silica Nanosphere Lithography Defined Light Trapping Structures for Ultra-thin Si Photovoltaics

Published online by Cambridge University Press:  01 June 2015

Natasa Vulic ,
Jea-Young Choi ,
Christiana B. Honsberg  and
Stephen M. Goodnick
Natasa Vulic
Affiliation:
School of Electrical, Computer and Energy Engineering, Arizona State University, Tempe, AZ 85287, U.S.A.
Jea-Young Choi
Affiliation:
School for Engineering of Matter, Transport and Energy, Arizona State University, Tempe, AZ 85287, U.S.A.
Christiana B. Honsberg
Affiliation:
School of Electrical, Computer and Energy Engineering, Arizona State University, Tempe, AZ 85287, U.S.A.
Stephen M. Goodnick
Affiliation:
School of Electrical, Computer and Energy Engineering, Arizona State University, Tempe, AZ 85287, U.S.A.
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Abstract

Periodic arrays of low-aspect ratio silicon nanopillars strongly reduce front surface reflection over a broad wavelength range. In this study, we numerically simulate the reflection of light for thick crystalline silicon substrates nanostructured through a combination of silica nanosphere lithography (SNL) and metal-assisted chemical etching (MaCE), producing ordered arrays of nanopillars with hexagonal periodicity. Using statistical methods, we show that the simulated measurements are in good agreement with the spectrophotometry measurements of the fabricated nanopillars.

Keywords

simulationSinanostructure
Type
Articles
Information
MRS Online Proceedings Library (OPL) , Volume 1770: Symposium A – Emerging Silicon Science and Technology , 2015 , pp. 31 - 36
Copyright
Copyright © Materials Research Society 2015 

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References

REFERENCES

Choi, J., Alford, T. L., and Honsberg, C. B., “Fabrication of Periodic Silicon Nanopillar in Two-dimensional Hexagonal Array with Enhanced Control on Structural Dimension and Period,” Langmuir, vol. 0, no. ja, p. null, 2015.Google Scholar
Choi, J., Alford, T. L., and Honsberg, C. B., “Solvent-Controlled Spin-Coating Method for Large-Scale Area Deposition of Two-Dimensional Silica Nanosphere Assembled Layers,” Langmuir, vol. 30, no. 20, pp. 5732–5738, 2014.CrossRefGoogle ScholarPubMed
Choi, J., “Development of Nanosphere Lithography Technique for Enhanced Lithographical Accuracy on Periodically Arrayed Si Nanostructure for Thin Si Solar Cell Application,” Arizona State University, Tempe, Arizona, 2015.Google Scholar
Nevière, M. and Popov, E., Light propagation in periodic media: differential theory and design. CRC Press, 2002.Google Scholar
Moharam, M. G. and Gaylord, T. K., “Rigorous coupled-wave analysis of planar-grating diffraction,” JOSA, vol. 71, no. 7, pp. 811–818, 1981.CrossRefGoogle Scholar
Li, L., “Formulation and comparison of two recursive matrix algorithms for modeling layered diffraction gratings,” JOSA A, vol. 13, no. 5, pp. 1024–1035, 1996.CrossRefGoogle Scholar
Li, L., “New formulation of the Fourier modal method for crossed surface-relief gratings,” JOSA A, vol. 14, no. 10, pp. 2758–2767, 1997.CrossRefGoogle Scholar
Taflove, A., Computational Electrodynamics. 2005.Google Scholar
Oskooi, A. F., Roundy, D., Ibanescu, M., Bermel, P., Joannopoulos, J. D., and Johnson, S. G., “Meep: A flexible free-software package for electromagnetic simulations by the FDTD method,” Comput. Phys. Commun., vol. 181, no. 3, pp. 687–702, Mar. 2010.CrossRefGoogle Scholar
Green, M. A. and Keevers, M. J., “Optical properties of intrinsic silicon at 300 K,” Prog. Photovoltaics Res. Appl., vol. 3, no. 3, pp. 189–192, 1995.CrossRefGoogle Scholar