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A Silicon-Based Shape Memory Alloy Microvalve

Published online by Cambridge University Press:  15 February 2011

Curtis A. Ray ,
Charles L. Sloan ,
A. David Johnson ,
John D. Busch  and
Bruce R. Petty
Curtis A. Ray
Affiliation:
Microflow Analytical, Inc., 3987 First St., Livermore, CA
Charles L. Sloan
Affiliation:
Microflow Analytical, Inc., 3987 First St., Livermore, CA
A. David Johnson
Affiliation:
TiNi Alloy Company, 1144 65th St., Oakland, CA
John D. Busch
Affiliation:
TiNi Alloy Company, 1144 65th St., Oakland, CA
Bruce R. Petty
Affiliation:
TiNi Alloy Company, 1144 65th St., Oakland, CA
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Abstract

A new actuator for silicon micro-valves has been developed and tested. A thin film shape memory alloy provides for large deflections with high speed, low power, and small size. The actuator is batch fabricated with planar processes.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 276: Symposia U/Y – Smart Materials Fabrication and Materials for Micro-Electro-Mechanical Systems , 1992 , 161
Copyright
Copyright © Materials Research Society 1992

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References

[1] Wagner, B., Benecke, W.; Microfabricated Actuator with Moving Permanent Magnet, IEEE MEMS Proceedings, Nara 1991 Google Scholar
[2] Farzad Pourahmadi, Lee Christel, Kurt Petersen, Joseph Mallon, Janusz Bryzek; Variable-flow Micro-valve Structure Fabricated With Silicon Fusion Bonding, IEEE Solid State Sensors Workshop, Hilton Head 1990 CrossRefGoogle Scholar
[3] Ohnstein, T.,. Fukiura, T., Ridley, J. and Bonne, U.; Micromachined Silicon Microvalve, IEEE MEMS Proceedings, NAPA 1990 Google Scholar
[4] Zdeblik, Mark, Barth, P.W., Angell, J.B.; A Microminiature Fluidic Amplifier, IEEE Hilton Head Workshop 1986 Google Scholar
[5] Jerman, J.H.; Electrically-Activated, Normally-Closed Diaphragm Valves, IEEE Transducers 1991 Google Scholar
[6] Lee, G., Ray, C., Siemers, R., and Moore, R.; Recent Developments in High Speed Chromatography, American Laboratory, February 1989 Google Scholar
[7] Burdick, J., Cal Tech (Private Communications)Google Scholar