Spa-Leed Measurements on Etched and Polished Silicon (111) Surfaces

Peter O. Hahn

doi:10.1557/PROC-54-645

Sauer, D.E. and Stuve, E.M. 1994. Ultrahigh vacuum surface analysis of silicon (100) treated in aqueous hydrofluoric acid and buffered hydrofluoric acid solutions. Applied Surface Science, Vol. 78, Issue. 1, p. 47.

Westmacott, K. H. Hinderberger, S. Radetic, T. and Dahmen, U. 1999. PVD Growth of FCC Metal Films On Single Crystal Si And Ge Substrates. MRS Proceedings, Vol. 562, Issue. ,

Westmacott, K.H. Hinderberger, S. and Radetic and U. Dahmen, T. 1999. Pvd Growth of Fcc Metal Films on Single Crystal Si and Ge Substrates. MRS Proceedings, Vol. 577, Issue. ,

Kawasuso, A Okada, S and Ichimiya, A 2000. Development and application of reflection high-energy positron diffraction. Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, Vol. 171, Issue. 1-2, p. 219.

Westmacott, K. H. Hinderberger, S. and Dahmen, U. 2001. Physical vapour deposition growth and transmission electron microscopy characterization of epitaxial thin metal films on single-crystal Si and Ge substrates. Philosophical Magazine A, Vol. 81, Issue. 6, p. 1547.

Sun, X. H. Wang, S. D. Wong, N. B. Ma, D. D. D. Lee, S. T. and Teo, Boon K. 2003. FTIR Spectroscopic Studies of the Stabilities and Reactivities of Hydrogen-Terminated Surfaces of Silicon Nanowires. Inorganic Chemistry, Vol. 42, Issue. 7, p. 2398.

Teo, Boon K. 2003. Doing chemistry on low-dimensional silicon surfaces: silicon nanowires as platforms and templates. Coordination Chemistry Reviews, Vol. 246, Issue. 1-2, p. 229.

Teo, Boon K. Chen, W. W. Sun, X. H. Wang, S. D. and Lee, S. T. 2005. Three-Dimensional Etching Profiles and Surface Speciations (via Attenuated Total Reflection-Fourier Transform Infrared Spectroscopy) of Silicon Nanowires in NH4F-Buffered HF Solutions: A Double Passivation Model. The Journal of Physical Chemistry B, Vol. 109, Issue. 46, p. 21716.

Chen, W. W. Sun, X. H. Wang, S. D. Lee, S. T. and Teo, Boon K. 2005. Etching Behavior of Silicon Nanowires with HF and NH4F and Surface Characterization by Attenuated Total Reflection Fourier Transform Infrared Spectroscopy: Similarities and Differences between One-Dimensional and Two-Dimensional Silicon Surfaces. The Journal of Physical Chemistry B, Vol. 109, Issue. 21, p. 10871.

Teo, Boon K. and Sun, X. H. 2007. Silicon-Based Low-Dimensional Nanomaterials and Nanodevices. Chemical Reviews, Vol. 107, Issue. 5, p. 1454.

Chabal, Yves J. Higashi, Gregg S. and Small, Robert J. 2008. Handbook of Silicon Wafer Cleaning Technology. p. 523.

Rupich, Sara M. and Chabal, Yves J. 2018. Handbook of Silicon Wafer Cleaning Technology. p. 505.

Save article to Kindle

Save article to Dropbox

Save article to Google Drive

Reply to: Submit a response

Your details

You have entered the maximum number of contributors

Conflicting interests