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STM studies of island nucleation during hyperthermal atom deposition

Published online by Cambridge University Press:  11 February 2011

Joshua M. Pomeroy  and
Joel D. Brock
Joshua M. Pomeroy*
Affiliation:
Cornell Center for Materials Research
Joel D. Brock
Affiliation:
Cornell Center for Materials Research
*
* currently with Los Alamos National Laboratory
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Abstract

We report fundamental changes in island nucleation dynamics as the kinetic energy of the constituent particles used for film grown is increased. A hyperthermal energy ion beam-line with precise control over ion kinetic energy was used to grow copper islands on a Cu(100) substrate. Dramatic increases in island densities were observed with increasing kinetic energy from thermal energies to 150 eV. We find that sputter erosion and the formation of adatom-vacancy pairs contribute to this increase. In addition, variations in flux and temperature suggest that the mean-field scaling exponent is sensitive to atomistic mechanisms activated by the ion beam.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 749: Symposium W – Morphological and Compositional Evolution of Thin Films , 2002 , W16.6
Copyright
Copyright © Materials Research Society 2003

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References

REFERENCES

1 Rosenfeld, G., Poelsema, B., and Comsa, G.. The Chemical Physics of Solid Surfaces: Growth and Propoerties of Ultrathin Epitaxial Epitaxial Layers, chapter 3 (Elsevier Science, New York) 1997.Google Scholar
2 Venables, J.A., Spiller, G.D.T, and Hanbücken, M., Rep. Prog. Phys. 47, 399–459 (1984).Google Scholar
3 Brune, Harald, Surf. Sci. Rep. 31 :121–229, 1998.Google Scholar
4 Amar, Jacques G. and Family, Fereydoon, Phys. Rev. Lett. 74, 2066, (1995).Google Scholar
5 Pomeroy, J.M., Couture, A.J., Murty, M.V.R., Butler, E.N., and Cooper, B.H., Rev. Sci. Instrum. 73, 3846 (2002).Google Scholar
6 The data points presented in Figures 2 and 3 represent the initial nuclei density determined by fitting the nuclei densities measured over several hours to a coarsening exponent and extrapolating that function back to t=0. The error bars represent the errors from each data point propagated through the fitting process. This method provides accurate initial island densities by incorporating the statistical weight of island distributions from many different places on the sample surface, and provides an adsorbate indicator more sensitive than STM or Auger.Google Scholar
7 Zuo, J.-K., Wendelken, J.F., Dürr, H., and Liu, C.-L., Phys. Rev. Lett. 72, 3064 (1994);Google Scholar
Dürr, H., Wendelken, J.F., and Zuo, J.-K., Surf. Sci. Lett. 328, L527 (1995);Google Scholar
Swan, Anna K., Shi, Zhu-Pei, Wendelken, John F., and Zhang, Zhenyu, Surf. Sci. Lett. 391, L1205 (1997).Google Scholar
8 Pomeroy, Joshua M., Jacobsen, Joachim, Hill, Colin C., Cooper, Barbara H., and Sethna, James P., Phys. Rev. B 66, TBD (15 Dec 2002);Google Scholar
Pomeroy, J.M., Couture, A., Jacobsen, J., Cooper, B.H., Sethna, J.P., and Brock, J.D., Mater. Res. Symp. Proc. Vol. 672, O2.9 (2001);Google Scholar
Pomeroy, J.M., Couture, A., Jacobsen, J., Hill, C.C., Sethna, J.P., Cooper, B.H., and Brock, J.D., Mater. Res. Symp. Proc. Vol. 648, P7.3 (2001).Google Scholar
9 Wulfhekel, W., Lipkin, N., Kliewer, J., Rosenfeld, G., Jorritsma, L., Poelsema, B., and Comsa, G., Surf. Sci. 348, 227 (1996).Google Scholar