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Stoichiometry of GaAs nanodots on GaAs(001)
Published online by Cambridge University Press: 02 July 2015
Abstract
We present a strain-free, self-assembled GaAs nanodots on GaAs(001) surfaces. Nanodots are studied by atomic force microscopy and field emission scanning electron microscopy. Nanodots self-assemble on the GaAs surface when two laser pulses overlap on the surface interferentially. Their stoichiometry is characterized by energy dispersive X-ray spectroscopy in the electron microscope. For the stoichiometry study, electrons with voltages less than 5 kilovolts were used to produce the characteristic X-rays from dots in order to enhance the surface sensitivity. The stoichiometric analysis indicates that the nanodots’ relative composition ratio of Ga over As reaches to that of GaAs substrate when the dot size becomes smaller than 100 nm. The chemical analysis suggests a novel route of strain-free semiconductor nanodots.
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- Copyright © Materials Research Society 2015
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