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Structure and Morphology of PD Overlayers on Epitaxial SNO2 Films Studied with the Atomic Force Microscope

Published online by Cambridge University Press:  25 February 2011

R. J. Lad ,
M. J. Matthews ,
M. D. Antonik ,
R. E. Cavicchi  and
S. Semancik
R. J. Lad
Affiliation:
Laboratory for Surface Science & Technology, 5764 Sawyer Research Center, University of Maine, Orono, ME 04469–5764
M. J. Matthews
Affiliation:
Laboratory for Surface Science & Technology, 5764 Sawyer Research Center, University of Maine, Orono, ME 04469–5764
M. D. Antonik
Affiliation:
Laboratory for Surface Science & Technology, 5764 Sawyer Research Center, University of Maine, Orono, ME 04469–5764
R. E. Cavicchi
Affiliation:
Chemical Science and Technology Laboratory, National Institute of Standards and Technology, Gaithersburg, MD 20899
S. Semancik
Affiliation:
Chemical Science and Technology Laboratory, National Institute of Standards and Technology, Gaithersburg, MD 20899
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Abstract

The structure and morphology of clean and Pd-doped epitaxial SnO2 films were studied with the atomic force microscope (AFM). The SnO2 films were grown by reactive sputter deposition on three different substrates yielding epitaxial orientations: (101) SnO2 / r-cut sapphire, (100) SnO2 / basal sapphire, and (110) SnO2 / TiO2 (110). AFM imaging of monolayer amounts of Pd deposited onto the epitaxial SnO2 films shows that the Pd is dispersed at 300 K and forms clusters after annealing to 500 K in vacuum.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 280: Symposium B – Evolution of Surface and Thin Film Microstructure , 1992 , 641
Copyright
Copyright © Materials Research Society 1993

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References

REFERENCES

[1] Janata, J., Anal. Chem. 64, 196R (1992) and references therein.CrossRefGoogle Scholar
[2] Heiland, G., Sensors and Actuators 2, 343 (1982).CrossRefGoogle Scholar
[3] Gopel, W., Prog. Surf. Sci. 20, 9 (1985).CrossRefGoogle Scholar
[4] Fryberger, T., Erikson, J.W. and Semancik, S., Surf. Interface Anal. 14, 83 (1989).CrossRefGoogle Scholar
[5] Fryberger, T. and Semancik, S., Sensors and Actuators B2, 305 (1990).Google Scholar
[6] Klober, J., Ludwig, M. and Schneider, H.A., Sensors and Actuators B 3, 69 (1991).CrossRefGoogle Scholar
[7] De Angelis, L. and Minnaja, N., Sensors and Actuators B3, 197 (1991).CrossRefGoogle Scholar
[8] Xu, C., Tamaki, J., Miura, N. and Yamazoe, N., Sensors and Actuators B 3, 147 (1991).Google Scholar
[9] Semancik, S. and Cavicchi, R.E., Thin Solid Films 206, 81 (1991).Google Scholar
[10] Antonik, M.D. and Lad, R.J., J. Vac. Sci. Technol. A10, 669 (1992).Google Scholar
[11] Cavicchi, R.E., Semancik, S., Antonik, M.D. and Lad, R.J., Appl. Phys. Lett. 61, 1921 (1992).CrossRefGoogle Scholar