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Structure and Properties of a-C:N Films Prepared by Pulsed Excimer Laser Deposition

Published online by Cambridge University Press:  01 January 1992

Fulin Xiong ,
R. P. H. Chang  and
C. W. White
Fulin Xiong
Affiliation:
Northwestern University, Department of Materials Science and Engineering, and Materials Research Center, Evanston, IL
R. P. H. Chang
Affiliation:
Northwestern University, Department of Materials Science and Engineering, and Materials Research Center, Evanston, IL
C. W. White
Affiliation:
Solid State Division, Oak Ridge National Laboratory, Oak Ridge, TN
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Abstract

We present results on the synthesis of a-C:N films deposited by pulsed excimer laser ablation of graphite in a nitrogen gas ambient. Analysis with RBS and forward recoil spectrometry show that the films are hydrogen-free and nitrogen can be incorporated upto 40% by varying the nitrogen gas pressure. Electron microscopy has identified these films to be amorphous. Raman spectroscopy, infrared spectroscopy, and electron energy loss spectroscopy have revealed carbon-nitrogen bonding structures. Compared to a-diamond films prepared by the same technique, the C:N films still possess the properties of high mechanical hardness, chemically inertness and good wear resistance, but incorporation of nitrogen into the films generally degrades their diamond-like properties. The results suggest that nitrogen doping effect is resulted in the films under the present process, instead of carbon-nitrogen compound formation.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 285: Symposium I – Laser Ablation in Materials Processing–Fundamentals and Applications , 1992 , 587
Copyright
Copyright © Materials Research Society 1993

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References

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