Hostname: page-component-6bf8c574d5-w79xw Total loading time: 0 Render date: 2025-02-22T23:41:45.175Z Has data issue: false hasContentIssue false
  • English
  • Français

The Structure of Hydrogenated Amorphous Silicon-Carbon Alloys as Investigated by Exafs

Published online by Cambridge University Press:  21 February 2011

S. Pascarelli ,
F. Boscherini ,
S. Mobilio  and
F. Evangelisti
S. Pascarelli
Affiliation:
INFN, Laboratori Nazionali di Frascati, P.O. Box 13, I-00044 Frascati (Roma), Italy.
F. Boscherini
Affiliation:
INFN, Laboratori Nazionali di Frascati, P.O. Box 13, I-00044 Frascati (Roma), Italy.
S. Mobilio
Affiliation:
INFN, Laboratori Nazionali di Frascati, P.O. Box 13, I-00044 Frascati (Roma), Italy. Dipartimento di Energetica, Universita dell'Aquila, Roio Monteluco, L'Aquila, Italy.
F. Evangelisti
Affiliation:
Dip. di Fisica, Universita “La Sapienza”, Piazzale Aldo Moro 2, 1–00185 Roma, Italy.
Get access

Abstract

We have studied the local structure of hydrogenated amorphous silicon-carbon alloy films, a-Si1−xCx:H, by measuring the extended x-ray absorption fine-structure (EXAFS) at the Si K edge.

We find that first coordination shell average bond lengths are 2.35 Å for Si-Si and 1.86 Å for Si-C and are constant with concentration to within × 0.015 Å.

By comparing the composition of the first coordination shell around Si with the average concentration we show that the alloy tends to be chemically ordered, in that heteroatomic bonds are preferred.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 219: Symposium A – Amorphous Silicon Technology - 1991 , 1991 , 283
Copyright
Copyright © Materials Research Society 1991

Access options

Get access to the full version of this content by using one of the access options below. (Log in options will check for institutional or personal access. Content may require purchase if you do not have access.)

References

REFERENCES

1. Bullot, J. and Schmidt, M. P., Phys. Stat. Sol. (b) 143, 345 (1987).CrossRefGoogle Scholar
2. Filipponi, A., Fiorini, P., Evangelisti, F., and Mobilio, S., MRS Symp. Proc. 95, 305 (1987).CrossRefGoogle Scholar
3. Mobilio, S. and Filipponi, A., J. Non-Cryst. Solids 97&98, 365 (1987).Google Scholar
4. McKenzie, D.R., Smith, G.B., and Liu, Z.Q., Phys. Rev. B 37, 8875 (1988).Google Scholar
5. Kaloyeros, A.E., Rizk, R.B., and Woodhouse, J.B., Phys. Rev. B 38, 13099 (1988).CrossRefGoogle Scholar
6. Lee, P.A., Citrin, P.H., Eisenberger, P., and Kincaid, B.M., Rev. Mod. Phys. 53, 769 (1981).Google Scholar
7. Balerna, A., Benfatto, M., Mobilio, S., Natoli, C.R., Filipponi, A., and Evangelisti, F., J. de Physique C8, 63 (1986).Google Scholar
8. Filipponi, A., Evangelisti, F., Benfatto, M., Mobilio, S., and Natoli, C.R. Phys. Rev. B 40, 9636(1989).Google Scholar
9. Beagley, B., Monaghan, J.J., and Hewitt, T.G., J. Mol. Struct. 8, 401 (1971).CrossRefGoogle Scholar
10. Incoccia, L., Mobilio, S., Proietti, M.G., Fiorini, P., Giovannella, C., and Evangelisti, F., Phys. Rev. B31, 1028 (1985).CrossRefGoogle Scholar
11. Boscherini, F., Filipponi, A., Pascarelli, S., Evangelisti, F., Mobilio, S., Marques, F.C., and Chambouleyron, I., Phys. Rev. B 39, 8364 (1989).Google Scholar
12. Cargill, G.S. III and Spaepen, F., J. Non-Cryst. Solids 43, 91 (1981).Google Scholar
13. Mui, K., Basa, D.K., Smith, F.W., and Corderman, R., Phys. Rev. B 35, 8089 (1987).Google Scholar
14. Demichelis, F., Kaniadakis, G., Mezzetti, E., Mpawenayo, P., Tagliaferro, A., Tresso, E., Rava, P., and Delia Mea, G., II Nuovo Cimento 9 D, 393 (1987).Google Scholar
15. Mahan, A.H., von Roedern, B., Williamson, D.L., and Madan, A., J. Appl. Phys. 57, 2717 (1985).Google Scholar
16. Sotiropoulos, J. and Weiser, G., J. Non-Cryst. Solids 97&98, 1087 (1987).CrossRefGoogle Scholar
17. Petrich, M.A., Gleason, K.K., and Reimer, J.A., Phys. Rev. B 36, 9722 (1987).Google Scholar
18. Smith, G.B. and McKenzie, D.R., J. Appl. Phys. 65, 1694 (1989);CrossRefGoogle Scholar
Mui, K. and Smith, F.W., Phys. Rev. B38, 10623 (1988).Google Scholar
19. De Seta, M., Narducci, P., and Evangelisti, F., these proceedings.Google Scholar