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Studies on Curvature Deformation Control of Bilayer Cantilever Fabricated by Surface Micromachining of SOI Wafer

Published online by Cambridge University Press:  26 February 2011

Yu-Ming Huang ,
Masayuki Sohgawa ,
Minoru Noda ,
Kaoru Yamashita ,
Masanori Okuyama  and
Haruo Noma
Yu-Ming Huang
Affiliation:
huangs@semi.ee.es.osaka-u.ac.jp, Grad. School of Eng. Sci., Osaka Univ., Dept. of Systems Innnovation, 1-3 Machikaneyama-cho, Toyonaka, Osaka, 560-8531, Japan
Masayuki Sohgawa
Affiliation:
sam@semi.ee.es.osaka-u.ac.jp, Grad. School of Eng. Sci., Osaka Univ., Dept. of Systems Innnovation, 1-3 Machikaneyama-cho, Toyonaka, Osaka, 560-8531, Japan
Minoru Noda
Affiliation:
noda@ee.es.osaka-u.ac.jp, Grad. School of Eng. Sci., Osaka Univ., Dept. of Systems Innnovation, 1-3 Machikaneyama-cho, Toyonaka, Osaka, 560-8531, Japan
Kaoru Yamashita
Affiliation:
yamashita@ee.es.osaka-u.ac.jp, Grad. School of Eng. Sci., Osaka Univ., Dept. of Systems Innnovation, 1-3 Machikaneyama-cho, Toyonaka, Osaka, 560-8531, Japan
Masanori Okuyama
Affiliation:
okuyama@ee.es.osaka-u.ac.jp, Grad. School of Eng. Sci., Osaka Univ., Dept. of Systems Innnovation, 1-3 Machikaneyama-cho, Toyonaka, Osaka, 560-8531, Japan
Haruo Noma
Affiliation:
noma@atr.jp, ATR, Knowledge Science Lab., 2-2-2- Hikari-dai, Seika, Souraku, Kyoto, 619-0288Japan
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Abstract

The Cr/Si bilayer cantilevers for an integrated multi-axis tactile sensor were fabricated by Si surface micromachining process. Among the cantilevers with various shapes, the rectangular and semicircular cantilevers can be deflected upward with good controllability. The maximum deflections are compared with those calculated by finite element method. Calculated deflections of Cr/Si cantilever agree considerably with the measured one. So, it is considered that the analysis by finite element method is useful as optimization of layer thickness and size to obtain the Cr/Si bilayer cantilevers with accurate deflection.

Keywords

microelectro-mechanical (MEMS)sensorCr
Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 969: Symposium W – Heterogeneous Integration of Materials for Passive Components and Smart Systems , 2006 , 0969-W05-01
Copyright
Copyright © Materials Research Society 2007

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