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Study of a-Si:H/μc-Si:H Heterojunction as Photosensor for Large Screen Projection Display

Published online by Cambridge University Press:  21 February 2011

Weiqiang Han ,
Gaorong Han ,
Jianmin Qiao ,
Pija Du ,
Danmei Zhao  and
Zishang Ding
Weiqiang Han
Affiliation:
Department of Materials Science and Engineering, Zhejiang University, Hangzhou, 310027, China
Gaorong Han
Affiliation:
Department of Materials Science and Engineering, Zhejiang University, Hangzhou, 310027, China
Jianmin Qiao
Affiliation:
Present Address: Microelectronics Laboratory, Santa Clara University, Santa Clara, CA 95053
Pija Du
Affiliation:
Department of Materials Science and Engineering, Zhejiang University, Hangzhou, 310027, China
Danmei Zhao
Affiliation:
Department of Materials Science and Engineering, Zhejiang University, Hangzhou, 310027, China
Zishang Ding
Affiliation:
Department of Materials Science and Engineering, Zhejiang University, Hangzhou, 310027, China
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Abstract

Liquid crystal light valve(LCLV) using an a-Si:H/μc-Si:H heterostructure as the photosensor and the nematic liquid crystal as the modulator has been firstly presented for large screen projection display. The a-Si:H photoconductor and μc-Si:H light blocking layer were prepared by a modified glow discharge CVD method. The optoelectric and structure properties of the μc-Si:H films deposited at different deposition conditions have been studied. The a-Si:H film and the continuously deposited pc-Si:H film possibly form an a-Si:H/μc-Si:H heterojunction. The electrical and optoelectric properties of the heterojunction has been studied.

LCLV using a-Si:H/μc-Si:H heterostructure has shown that the most aspects of the device performance can be improved.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 258: Symposium A – Amorphous Silicon Technology – 1992 , 1992 , 1099
Copyright
Copyright © Materials Research Society 1992

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References

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