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Study of the Ion-Acoustic Effect using Focused Ion Beams

Published online by Cambridge University Press:  03 September 2012

J. Teichert ,
L. Bischoff  and
B. Köhler
J. Teichert
Affiliation:
Institute of Ion Beam Physics and Materials Research, Research Center Rossendorf Inc., PO Box 510119, D-01314 Dresden, Germany, teichert@fz-rossendorf.de
L. Bischoff
Affiliation:
Institute of Ion Beam Physics and Materials Research, Research Center Rossendorf Inc., PO Box 510119, D-01314 Dresden, Germany, teichert@fz-rossendorf.de
B. Köhler
Affiliation:
Fraunhofer-Institute for Nondestructive Testing, Branch Lab Dresden, Krügerstraiße 22, D-01326 Dresden, Germany
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Abstract

Acoustic waves induced by an intensity-modulated focused ion beam (FIB) have been measured. The experiments were performed with Ga+ ions of 35 keV at a current of 3 nA and variable chopping frequency up to 10 MHz. The acoustic signals were detected by means of a piezoelectric sensor with integrated pre-amplifier. In the paper the experimental setup and the results of first measurements are presented. Evidence for FIB induced acoustic waves has been found.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 438: Symposium A – Materials Modificaton and Synthesis by Ion Beam… , 1996 , 555
Copyright
Copyright © Materials Research Society 1997

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