Hostname: page-component-cd9895bd7-dk4vv Total loading time: 0 Render date: 2024-12-29T14:16:27.975Z Has data issue: false hasContentIssue false
  • English
  • Français

SU8 / modified MWNT composite for piezoresistive sensor application

Published online by Cambridge University Press:  20 January 2011

Prasenjit Ray ,
V. Seena ,
Rupesh A. Khare ,
Arup R. Bhattacharyya ,
Prakash R. Apte  and
Ramgopal Rao
Prasenjit Ray
Affiliation:
Centre of Excellence in Nanoelectronics, Department of Electrical Engineering, Indian Institute of Technology Bombay, Mumbai, Maharashtra, India.
V. Seena
Affiliation:
Centre of Excellence in Nanoelectronics, Department of Electrical Engineering, Indian Institute of Technology Bombay, Mumbai, Maharashtra, India.
Rupesh A. Khare
Affiliation:
Department of Metallurgical Engineering & Materials Science, Indian Institute of Technology Bombay, Mumbai, Maharashtra, India.
Arup R. Bhattacharyya
Affiliation:
Department of Metallurgical Engineering & Materials Science, Indian Institute of Technology Bombay, Mumbai, Maharashtra, India.
Prakash R. Apte
Affiliation:
Centre of Excellence in Nanoelectronics, Department of Electrical Engineering, Indian Institute of Technology Bombay, Mumbai, Maharashtra, India.
Ramgopal Rao
Affiliation:
Centre of Excellence in Nanoelectronics, Department of Electrical Engineering, Indian Institute of Technology Bombay, Mumbai, Maharashtra, India.
Get access

Abstract

SU-8 is being increasingly used as a compliant structural material for MEMS applications due to its interesting properties such as lower Young’s modulus and higher mechanical and thermal stability. One of the popular classes of MEMS devices is a piezoresitive microcantilever. Ultra-sensitive polymer composite cantilevers made up of SU-8 as a structural layer and 10% carbon Black in SU8 as a piezoresistive layer with lower Young’s modulus and higher gauge factor have been reported recently by our group. Higher electrical conductivity at lower concentration of conductive filler is of increased interest. Here we report a novel composite with purified multiwall carbon nanotubes (MWNT) in SU8 as a piezoresistor. MWNT were modified with octadecyl triphenyl phosphonium bromide (OTPB) in order to achieve debundled MWNT. A microcantilever device with integrated MWNT/SU-8 composite has been fabricated and characterized.

Keywords

compositepolymermicroelectro-mechanical (MEMS)
Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 1299: Symposium S – Microelectromechanical Systems—Materials and Devices IV , 2011 , mrsf10-1299-s04-11
Copyright
Copyright © Materials Research Society 2011

Access options

Get access to the full version of this content by using one of the access options below. (Log in options will check for institutional or personal access. Content may require purchase if you do not have access.)

References

REFERENCES

1. Tortonese, M., Yamada, H., Barrett, R. C., and Quate, C. F., in The Proceeding of Transducers ’91 IEEE , Piscataway, NJ, 1991, pp. 448–451.Google Scholar
2. Harley, J. A. and Kenny, T. W. Appl. Phys. Lett. 75, 289 (1999)CrossRefGoogle Scholar
3. Giessibl, F. J. and Trafas, B. M., Rev. Sci. Instrum. 65, 1923 (1994).CrossRefGoogle Scholar
4. Boisen, A., Thaysen, J., Jensenius, H., and Hansen, O., Ultramicroscopy 82,11 (2000)CrossRefGoogle Scholar
5. Yang, Mo, Zhang, Xuan, Vafai, Kambiz and Ozkan, Cengiz S, J. Micromech. Microeng. 13(2003) pp. 864–872 CrossRefGoogle Scholar
6. Johnny, H. HE and Yong Feng, L.I., Journal of Physics: Conference Series 34 (2006) pp 429–435.Google Scholar
7. Jin, Dazhong, Li, Xinxin, Liu, Jian, Zuo, Guomin, YuelinWang, , Liu, Minand Yu, Haitao, J. Micromech. Microeng. 16 (2006) pp 1017–1023.CrossRefGoogle Scholar
8. Thaysen, J., Yal,cinkaya, A.D, Vettiger, P. and Menon, A., J. Phys. D: Appl. Phys 35(2002) pp 2698–2703.CrossRefGoogle Scholar
9. Kale, N.S., Nag, S., Pinto, R., Rao, V.R. J. Microelectromech. Syst 18 (2009) pp79–87 CrossRefGoogle Scholar
10. V., Seena, Kale, N.S., N., Sudip, Joshi, M., Mukherji, S., Rao, V.R. Int.J. Micro and Nano Syst.1(2009) pp. 65–70.Google Scholar
11. Gammelgaard, L., Rasmussen, P. A., Calleja, M., Vettiger, P., and Boisen, A., Appl. Phys. Lett., 88(2006) 113508.CrossRefGoogle Scholar
12. Seena, V., Rajorya, Anukool, Pant, Prita, Mukherji, Soumyo, Ramgopal Rao, V., Solid State Sciences 11 (2009) pp. 1606–1611.CrossRefGoogle Scholar
13. Seena, V., Rajorya, A., Fernaundus, A., Dhale, K., Pant, P.,.Mukherji, S., Rao, V.R., Proceedings of the 23rd IEEE International Conference on Micro Electro Mechanical Systems (2010), January 24–28, 2010, Hong Kong, pp. 851–854 Google Scholar
14. Bose, S., Bhattacharyya, A.R., Khare, R.A., Kulkarni, A.R., Patro, T.U., and Sivaraman, P., Nanotechnology, 19, 335704 (2008).CrossRefGoogle Scholar