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Surface Phenomena of the Thin Diamond-Like Carbon Films

Published online by Cambridge University Press:  10 February 2011

V. I. Polyakov ,
A. I. Rukovishnikov ,
A. V. Khomich ,
B. L. Druz ,
D. Kania ,
A. Hayes ,
M. A. Prelas ,
R. V. Tompson ,
T. K. Ghosh  and
S. K. Loyalka
V. I. Polyakov
Affiliation:
Institute of Radio Eng. & Electronics, RAS, 11 Mohovaya str., Moscow 103907, Russia, pvi@aha.ru
A. I. Rukovishnikov
Affiliation:
Institute of Radio Eng. & Electronics, RAS, 11 Mohovaya str., Moscow 103907, Russia, pvi@aha.ru
A. V. Khomich
Affiliation:
Institute of Radio Eng. & Electronics, RAS, 11 Mohovaya str., Moscow 103907, Russia, pvi@aha.ru
B. L. Druz
Affiliation:
Veeco Instruments Inc., Plainview, NY 11803, USA
D. Kania
Affiliation:
Veeco Instruments Inc., Plainview, NY 11803, USA
A. Hayes
Affiliation:
Veeco Instruments Inc., Plainview, NY 11803, USA
M. A. Prelas
Affiliation:
University of Missouri-Columbia, MO 65211, USA
R. V. Tompson
Affiliation:
University of Missouri-Columbia, MO 65211, USA
T. K. Ghosh
Affiliation:
University of Missouri-Columbia, MO 65211, USA
S. K. Loyalka
Affiliation:
University of Missouri-Columbia, MO 65211, USA
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Abstract

Diamond-like carbon films (DLC) 10–40 nm thick were deposited on quartz substrates on an interdigitated planar array of 20 μm Ni electrodes already prepared by lithographic techniques. The influence of the adsorbed molecules onte electrical properties of the thin DLC films was investigated. Current and capacitance-voltage characteristics were examined. Charge-based deep level transient spectroscopy (Q-DLTS) was used for study of adsorption and desorption processes. The strong sensitivity of Q-DLTS spectra to the presence of the vapor water and isopropyl alcohol was found. For example, the Q-DLTS signal for some deposited DLC film was changed more then in order in presence of the water vapor. Such strong surface phenomena of the thin DLC films may be exploited in novel gas sensor devices.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 555: Symposium OO – Properties and Processing of Vapor-Deposited Coatings , 1998 , 345
Copyright
Copyright © Materials Research Society 1999

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