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Synthesis and characterization of combinatorial libraries of semiconductor gas sensors.

Published online by Cambridge University Press:  01 February 2011

M. A. Aronova ,
K. S. Chang ,
I. Takeuchi ,
H. Jabs ,
D. Westerheim ,
A. Gonzalez-Martin ,
J. Kim  and
B. Lewis
M. A. Aronova
Affiliation:
Small Smart Systems Center, Department of Material Science and Engineering, and Center for Superconductivity Research, Department of Physics, University of Maryland, College Park, Maryland 20742
K. S. Chang
Affiliation:
Small Smart Systems Center, Department of Material Science and Engineering, and Center for Superconductivity Research, Department of Physics, University of Maryland, College Park, Maryland 20742
I. Takeuchi
Affiliation:
Small Smart Systems Center, Department of Material Science and Engineering, and Center for Superconductivity Research, Department of Physics, University of Maryland, College Park, Maryland 20742
H. Jabs
Affiliation:
Lynntech, Inc., College Station, Texas 77840
D. Westerheim
Affiliation:
Lynntech, Inc., College Station, Texas 77840
A. Gonzalez-Martin
Affiliation:
Lynntech, Inc., College Station, Texas 77840
J. Kim
Affiliation:
Lynntech, Inc., College Station, Texas 77840
B. Lewis
Affiliation:
Lynntech, Inc., College Station, Texas 77840
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Abstract

We have fabricated thin-film combinatorial gas sensor libraries based on doped semiconducting SnO2 thin films. The utility of combinatorial libraries is two-fold: one is to search and optimize the compositions for high sensitivity and selectivity of gases, and the other is to make use of the natural array geometry of the libraries with different sensor elements for electronic noses. Combinatorial pulsed-laser ablation was used to deposit compositionally varying arrays of sensor elements onto a pre-patterned device electrode configuration. Using a multiplexing electronics, we have demonstrated detection of chloroform, formaldehyde, and benzene gases at concentrations down to 12.5 ppm through pattern recognition of signals from the arrays of sensors.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 804: Symposium JJ – Combinatorial and Artificial Intelligence Methods in Materials Science II , 2003 , JJ9.14
Copyright
Copyright © Materials Research Society 2004

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