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Published online by Cambridge University Press: 17 March 2011
The technologies of fabrication of thin film phosphors based on gallium nitride using rf-magnetron sputtering are developed and the structural properties of these films are studied. Luminescence and electron spin resonance (ESR) spectra of GaN and GaN-Mn thin films are obtained. A correlation between cathodo-luminescence intensity and conductivity of GaN films is found. The nature of emission centers in GaN and GaN-Mn thin films is discussed and a mechanism of luminescence in these films is proposed.