Hostname: page-component-6bf8c574d5-9nwgx Total loading time: 0 Render date: 2025-02-22T17:00:52.480Z Has data issue: false hasContentIssue false
  • English
  • Français

Synthesis and Radical Polymerization of Pyrocarbonate Functionalized Monomers: Application to Positive-Tone Photoresists

Published online by Cambridge University Press:  10 February 2011

S.O. Vansteenkiste ,
Y. Marleé ,
E.H. Schacht ,
M. Van Damme ,
H. van Aert  and
J. Vermeersch
S.O. Vansteenkiste
Affiliation:
Polymer Materials Research Group, Department of Organic Chemistry, Faculty of Science, University of Gent, Krijgslaan 281 S4bis, B-9000 Gent, Belgium, stefan.vansteenkiste@rug.ac.be
Y. Marleé
Affiliation:
Polymer Materials Research Group, Department of Organic Chemistry, Faculty of Science, University of Gent, Krijgslaan 281 S4bis, B-9000 Gent, Belgium
E.H. Schacht
Affiliation:
Polymer Materials Research Group, Department of Organic Chemistry, Faculty of Science, University of Gent, Krijgslaan 281 S4bis, B-9000 Gent, Belgium
M. Van Damme
Affiliation:
Agfa-Gevaert N.V., Septestraat 27, B-2640 Mortsel, Belgium
H. van Aert
Affiliation:
Agfa-Gevaert N.V., Septestraat 27, B-2640 Mortsel, Belgium
J. Vermeersch
Affiliation:
Agfa-Gevaert N.V., Septestraat 27, B-2640 Mortsel, Belgium
Get access

Abstract

The synthesis of two new tert-butyl carbonic anhydride monomers, 4-vinylbenzoic and methacrylic tert-butyl carbonic anhydride was achieved successfully. Radical polymerization at 45°C yielded tert-butyl pyrocarbonate protected materials. Thermographic analysis showed that both polymers decompose cleanly at 135°C. The lithographic performance of both materials was evaluated in presence of 2,4,6-tris-(trichloromethyl)-s-triazine as photoacid generating species. It was demonstrated that the large polarity change resulted in a chemically amplified positive photoresist system

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 624: Symposium V – Materials Development for Direct Write Technologies , 2000 , 199
Copyright
Copyright © Materials Research Society 2000

Access options

Get access to the full version of this content by using one of the access options below. (Log in options will check for institutional or personal access. Content may require purchase if you do not have access.)

References

REFERENCES

1 Ito, H., Willson, C., and Fréchet, J., Digest of Technical Papers of 1982 Symposium on VLSI Technology, 1982, p. 86.Google Scholar
2 Ito, H., and Willson, C., Technical Papers of SPE Regional Technical Conference on Photo-polymers, 1982, p.331.Google Scholar
3 Ito, H., and Willson, C. in Polymers in Electronics, edited by Davidson, T. (ACS Symposium Series 242, Washington DC, 1984), p. 11.Google Scholar
4 Fréchet, J., Eichler, E., Ito, H., and Willson, C., Polymer 24, p. 995 (1983).Google Scholar
5 Ito, H., Willson, C., Fréchet, J., Farrall, M., and Eichler, E., Macromolecules 16, p.510 (1983).Google Scholar
6 Ito, H., and Willson, C., Proceedings of the ACS Division of Organic Coatings and Plastics Chemistry, 1983, vol. 48, p.60.Google Scholar
7 Allen, R., Wallraff, G., Hinsberg, W., Conley, W., and Kunz, R., Solid State Technol. 53, (1993).Google Scholar
8 Harwood, L.M., Moody, C.J., Experimental Organic Chemistry, Principles and Practice, Blackwell Scientific Publication, Oxford, 1989, p.588.Google Scholar
9 Ishizone, T., Hirao, A., and Nakahama, S., Macromolecules 22, 2895 (1989).Google Scholar
10 Tarbell, D., Acc. Chem. Res. 2, 296 (1969).Google Scholar
11 Chow, R., and Tarbell, D., J. Org. Chem. 32, 2188 (1967).Google Scholar