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Synthesis of Controllably Grown Carbon Nanotubes Interconnects

Published online by Cambridge University Press:  01 February 2011

Seon Woo Lee ,
David Katz ,
Avi Kornblit ,
Daniel Lopez  and
Haim Grebel
Seon Woo Lee
Affiliation:
geniusturtle@hotmail.com, New Jersey Institute of Technology, Electrical Engineering, 333 Grand Ave 2E, Palisades Park, NJ, 07650, United States, 973-391-3254
David Katz
Affiliation:
katzd@njit.edu, Electronic Imaging Center at New Jersey Institute of Technology, Electrical and Computer Engineering, Newark, NJ, 07102, United States
Avi Kornblit
Affiliation:
kornblit@lucent.com, New Jersey Nanotechnology Consortium (NJNC), Lucent Technologies Bell Labs, Murray Hill, NJ, 07974, United States
Daniel Lopez
Affiliation:
dol@lucent.com, New Jersey Nanotechnology Consortium (NJNC), Lucent Technologies Bell Labs, Murray Hill, NJ, 07974, United States
Haim Grebel
Affiliation:
grebel@njit.edu, Electronic Imaging Center at New Jersey Institute of Technology, Electrical and Computer Engineering, Newark, NJ, 07102, United States
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Abstract

Intra-connects (bridges spanning across in plane electrodes), which were made of carbon nanotube (CNT), were fabricated by CO Plasma Enhanced Chemical Vapor Deposition (PECVD), ethanol CVD and pyrolitic CO CVD. CO PECVD has been used with CO/H2 mixture at relatively low temperatures. Its yield was relatively low though and the quality of CNT intra-connect was not to par. Ethanol CVD resulted in many more multi-wall carbon nanotube (MWCNT) than single-wall carbon nanotube (SWCNT) intra-connects. CO CVD was the most effective and simplest way to grow CNT interconnects among the three methods, yielding well-aligned and straight SWCNT bridges.

Keywords

chemical vapor deposition (CVD) (chemical reaction)plasma-enhanced CVD (PECVD) (chemical reaction)Raman spectroscopy
Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 1018: Symposium EE – Applications of Nanotubes and Nanowires , 2007 , 1018-EE05-02
Copyright
Copyright © Materials Research Society 2007

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