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Synthesis of Diamond Films by Laser-Induced Chemical Vapor Deposition

Published online by Cambridge University Press:  25 February 2011

Yoshiyuki Goto ,
Toshinori Yag  and
Haruhiko Nagai
Yoshiyuki Goto
Affiliation:
Manufacturing Development Laboratory
Toshinori Yag
Affiliation:
Manufacturing Development Laboratory
Haruhiko Nagai
Affiliation:
Central Research Laboratory Mitsubishi Electric Corp., 1-1, Tsukaguchi-honmachi, 8-chome, Amagasaki, Hyogo, 661, Japan
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Abstract

An experimental study of diamond formation by laser-induced chemical vapor deposition (CVD) technique using a gaseous mixture of H2 and CCl4 is reported. The laser used in this work is an ArF excimer laser which emits 80 - 200 mJ pulses with 20 ns duration. We have succeeded in obtaining thin films of diamond by the activation of hydrogen to enhance the removal of graphite and the production of CH radicals. Films obtained without the activation were composed of amorphous carbon and graphite. Hydrogen was activated by a microwave discharge tube or a hot tungsten filament. Films were characterized by Raman scattering and reflection electron diffraction. The diagnostic study using a visible optical emission spectroscope shows that the emission intensity ratio of CH to C2 radicals increases in the system with the activation.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 129: Symposium B – Laser and Particle-Beam Modification of Chemical Processes on Surfaces , 1988 , 213
Copyright
Copyright © Materials Research Society 1989

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References

REFERENCES

(1) Aisenberg, A. and Chabot, R., J. Appl. Phys. 42, 2953 (1971)Google Scholar
(2) Derjaguin, B.V., Soc. Phys. Dokl. 21, 676 (1976)Google Scholar
(3) Kamo, M., Sato, Y., Matsumoto, S. and Setaka, S., J. Cryst. Growth 62, 642 (1983)CrossRefGoogle Scholar
(4) Sawabe, A. and Inuzuka, T., Appl. Phys. Lett. 46, 146 (1985)Google Scholar
(5) Baulch, D.L., Cox, R.A., Crutzen, P.J., Troe, J., Hampson, R.F. Jr., Kerr, J.A. and Watson, R.T., J. Phys. Chem. Ref. Data. 11, 487 (1982)Google Scholar
(6) Mitsuda, Y., Kojima, Y., Yoshida, T. and Akashi, K., J. Mater. aSci. 22, 1557 (1987)Google Scholar