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Synthesis of Terbia Doped Yttria Stabilized Zirconia Thin Films by Using the Electrostatic Spray Deposition (ESD) Technique

Published online by Cambridge University Press:  15 February 2011

N.H.J. Stelzer ,
A. Goossens  and
J. Schoonman
N.H.J. Stelzer
Affiliation:
Laboratory for Applied Inorganic Chemistry, Delft University of Technology, Julianalaan 136, 2628 BL Delft, The Netherlands, n.h.j.@stm.tudelft.nl
A. Goossens
Affiliation:
Laboratory for Applied Inorganic Chemistry, Delft University of Technology, Julianalaan 136, 2628 BL Delft, The Netherlands, n.h.j.@stm.tudelft.nl
J. Schoonman
Affiliation:
Laboratory for Applied Inorganic Chemistry, Delft University of Technology, Julianalaan 136, 2628 BL Delft, The Netherlands, n.h.j.@stm.tudelft.nl
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Abstract

Terbia doped yttria stabilized zirconia (Tb-YSZ) thin films have been deposited on various substrates by applying the electrostatic spray deposition (ESD) technique. Yttrium- and zirconium-acetylacetonate as well as terbium-acetate hydrate were used as precursors. Butyl carbitol-ethanol mixed alcohol's with ratios of 50:50 vol% and 80:20 vol% were used as solvents for precursor solutions with total metal concentrations between 0.09 M and 0.009 M. Tb-YSZ thin films were deposited at temperatures between 520 K and 730 K. Surface morphology, chemistry, and crystal structure were studied using scanning electron microscopy (SEM), energy dispersive X-ray (EDX), and X-ray diffraction (XRD). The Tb-YSZ layers consist of a fully stabilized cubic phases. The surface morphology of deposited Tb-YSZ layers can be controlled by changing different deposition parameters. The adhesion of Tb-YSZ to the substrate can be improved by a high temperature treatment.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 453: Symposium R – Solid State Chemistry of Inorganic Materials , 1996 , 543
Copyright
Copyright © Materials Research Society 1997

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References

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