Hostname: page-component-78c5997874-g7gxr Total loading time: 0 Render date: 2024-11-13T02:18:18.092Z Has data issue: false hasContentIssue false
  • English
  • Français

Templating Nanopores Into Poly(MethylSilsesquioxane): New Lowdielectric Coatings Suitable for MicroElectronic Applications

Published online by Cambridge University Press:  10 February 2011

Julius F. Remenar ,
Craig J. Hawker ,
James L. Hedrick ,
Sung Mog Kim ,
Robert D. Miller ,
Cattien Nguyen ,
Mikael Trollsås  and
Do Y. Yoon
Julius F. Remenar
Affiliation:
Center on Polymer Interfaces and Macromolecular Assemblies, IBM Almaden Research Center, San Jose, CA, 95120.
Craig J. Hawker
Affiliation:
Center on Polymer Interfaces and Macromolecular Assemblies, IBM Almaden Research Center, San Jose, CA, 95120.
James L. Hedrick
Affiliation:
Center on Polymer Interfaces and Macromolecular Assemblies, IBM Almaden Research Center, San Jose, CA, 95120.
Sung Mog Kim
Affiliation:
Center on Polymer Interfaces and Macromolecular Assemblies, IBM Almaden Research Center, San Jose, CA, 95120.
Robert D. Miller
Affiliation:
Center on Polymer Interfaces and Macromolecular Assemblies, IBM Almaden Research Center, San Jose, CA, 95120.
Cattien Nguyen
Affiliation:
Center on Polymer Interfaces and Macromolecular Assemblies, IBM Almaden Research Center, San Jose, CA, 95120.
Mikael Trollsås
Affiliation:
Center on Polymer Interfaces and Macromolecular Assemblies, IBM Almaden Research Center, San Jose, CA, 95120.
Do Y. Yoon
Affiliation:
Center on Polymer Interfaces and Macromolecular Assemblies, IBM Almaden Research Center, San Jose, CA, 95120.
Get access

Abstract

Thin films of nanoporous poly(methylsilsesquioxane) have been prepared from organic/inorganic polymer hybrids. Low molecular weight 6-arm star poly(caprolactone)s are incorporated into partially pre-condensed methylsilsesquioxane resin. Upon heating, the glass resin cross-links around the organic polymer templates. Thermal decomposition of the orgainc polymer produces nanoporous thin films which show tunable dielectric constants as low as 1.9 and exhibit properties suitable for use in interconnect devices. Experimental data including porosity, morphology, and dielectric constants are presented.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 511: Symposium E – Low Dielectric Constant Materials IV , 1998 , 69
Copyright
Copyright © Materials Research Society 1998

Access options

Get access to the full version of this content by using one of the access options below. (Log in options will check for institutional or personal access. Content may require purchase if you do not have access.)

References

REFERENCES

(1) The National Technology Roadmap for Semiconductors. Technology Needs. Published by Semiconductor Industry Association in 1997.Google Scholar
(2) For examples of porous silicates, see (a) Saegusa, T.; Chujo, Y. Makromol. Chem., Macromol. Symp. 64, 1, (1992). (b) Chujo, Y.; Ihara, E.; et al. Macromolecules 1993, 26, 5681. (c) Toki, M.; Chow, T.; et al. Polym. Bull. 29, 653 (1992). (d) Landry, D. J. T.; Coltrain, B. K.; Wesson, J. A.; Lippert, J. L. Zumbulyadis, N. Polymer 33 (7), 1496 (1992). (e) Landry, C. J. T.; Coltrain, B. K.; Brady, B. K. Polymer 33(7), 1486 (1992). (f) Fitzgerald, J. J.; Landry, C. J. T.; Pochan, J. M. Macromolecules 25, 3715 (1992).Google Scholar
(3) Synthesis of the macromonomers and 6-arm star PCLs is described in Trollsås, M.; Hedrick, J. L.; Mecerreyes, D.; Dubois, Ph.; Jerome, R.; Ihre, H.; Hult, A. Macromolecules, 30, 8508 (1997).Google Scholar
(4) Sanchez, M. I.; Hedrick, J. L.; Russell, T. P. J. Polym. Sci: Part B: Polym. Phys. 33, 253 (1995).Google Scholar