Hostname: page-component-cd9895bd7-7cvxr Total loading time: 0 Render date: 2024-12-30T23:18:40.329Z Has data issue: false hasContentIssue false
  • English
  • Français

Thin film combustible gas sensors based on Zinc Oxide

Published online by Cambridge University Press:  21 March 2011

Patrícia Nunes  and
Elvira Fortunato
Patrícia Nunes
Affiliation:
Rodrigo Martins Department of Materials Science/CENIMAT, Faculty of Sciences and Technology, New University of Lisbon and CEMOP-UNINOVA, 2829-516 Caparica, Portugal
Elvira Fortunato
Affiliation:
Rodrigo Martins Department of Materials Science/CENIMAT, Faculty of Sciences and Technology, New University of Lisbon and CEMOP-UNINOVA, 2829-516 Caparica, Portugal
Get access

Abstract

Sensitivity tests to reductive gases such as methane, hydrogen and ethane were performed on zinc oxide (ZnO) thin films. The highest value of sensitivity was obtained for the film with a high electrical resistivity and a low thickness. The variation of the operating temperature of the film leads to a significant change in the sensitivity of the sensor with an ideal operating temperature dependence of the gas used. The sensitivity of the ZnO thin films changes linear with the increase of the gas concentration. However these films seem to be more appropriated for the detection of hydrogen following by methane and than for ethane since the value of sensitivity obtained are higher and its variation with the gas concentration more pronounced.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 666: Symposium F – Transport and Microstructural Phenomena , 2001 , F5.2
Copyright
Copyright © Materials Research Society 2001

Access options

Get access to the full version of this content by using one of the access options below. (Log in options will check for institutional or personal access. Content may require purchase if you do not have access.)

References

REFERENCES

[1] Molesey, P.T. and Tofield, B.C., Mater. Sci. Technol. 1, 505 (1985).Google Scholar
[2] Aslam, M. and Vijayamohanan, K., Sensors and Actuators B 75, 162 (1999).Google Scholar
[3] Suzuki, T. and Noma, T., J. Mater. Scienc. 26, 6419 (1991).Google Scholar
[4] Rao, G.S. and Rao, D., Sensors and Actuators B 55, 166 (1999).Google Scholar
[5] Ihokura, K., Watson, J., “The Stannic Oxide Gas Sensor-Principles & Applications” (CRC Press, Boca Raton, 1994) p. 35.Google Scholar
[6] Bae, H. Y., Choi, G. M., Sensors Actuators B, Vol. 55, 47 (1999).Google Scholar
[7] Chang, R., in Química ed. Xavier, Hugo (McGraw-Hill 1994) p.1061.Google Scholar
[8] Hoefer, U., EuroSensors XIV, (2000) 509.Google Scholar
[9] Major, S., Banerjee, A. and Chopra, K.L., Thin Solid Films 122, 31 (1984).Google Scholar