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Thin Films of (Ba, Sr)TiO3 by Aerosol Combustion

Published online by Cambridge University Press:  10 February 2011

A. Kussmaul ,
A.C. Greenwald ,
C.H. Wei  and
T.F. Morse
A. Kussmaul
Affiliation:
Spire Corporation, One Patriots Park, Bedford, MA 01730–2396
A.C. Greenwald
Affiliation:
Spire Corporation, One Patriots Park, Bedford, MA 01730–2396
C.H. Wei
Affiliation:
Brown Univ. Providence, RI.
T.F. Morse
Affiliation:
Brown Univ. Providence, RI.
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Abstract

Barium-strontium-titanate (BST) films were deposited on platinum-coated ceramic substrates and platinum foil by the aerosol combustion process. A fine mist of metallic precursors in solution was carried into a methane-oxygen flame to produce ceramic particles, which coated the substrate. Both aqueous and purely organic solutions were tested, the latter producing finer powders (less than 100 nm) with high phase purity. Sintering the as-deposited particulate material led to a porous film at all sintering temperatures studied, regardless of the solution used. Cold pressing of the organicsolution- based material prior to heating, without the addition of any binders or solvents, gave a fully dense solid after sintering at 1450°C.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 433: Symposium T – Ferroelectric Thin Films V , 1996 , 39
Copyright
Copyright © Materials Research Society 1996

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References

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