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Three Dimensional Simulation of the Morphological Evolution of a Strained Film on a Thick Substrate

Published online by Cambridge University Press:  10 February 2011

Cheng-hsin Chiu
Cheng-hsin Chiu*
Affiliation:
Institute of Materials Research and Engineering, Blk S7 Level 3, National University of Singapore, Singapore119260
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Abstract

This paper presents a three-dimensional simulation for the surface evolution of a strained film on a thick substrate. The simulation shows that an initially random morphology will first transform into a profile dominated by two-dimensional ridges, and then into a three-dimensional island surface. The simulation also demonstrates that the ridge-island transition is a kinetic process which can be delayed by changing the initial morphology.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 529: Symposia BB – Computational & Mathematical Models of Microstructural Evolution , 1998 , 125
Copyright
Copyright © Materials Research Society 1998

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