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Top Electrode Area Dependence on Displacement Property of Lead Zirconate Titanate Films Prepared by Chemical Solution Deposition Process

Published online by Cambridge University Press:  11 February 2011

Takashi Iijima ,
Sachiko Ito  and
Hirofumi Matsuda
Takashi Iijima
Affiliation:
Smart Structure Research Center, National Institute of Advanced Industrial Science and Technology (AIST), Tsukuba Central 2, 1–1–1 Umezono, Tsukuba 305–8568, Japan
Sachiko Ito
Affiliation:
Smart Structure Research Center, National Institute of Advanced Industrial Science and Technology (AIST), Tsukuba Central 2, 1–1–1 Umezono, Tsukuba 305–8568, Japan
Hirofumi Matsuda
Affiliation:
Smart Structure Research Center, National Institute of Advanced Industrial Science and Technology (AIST), Tsukuba Central 2, 1–1–1 Umezono, Tsukuba 305–8568, Japan
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Abstract

Effects on ferroelectric and piezoelectric properties of top-electrode diameter variance from 80 to 8 μm were investigated using an AFM probing system connected with a ferroelectric test system with bipolar and unipolar signals at 5 Hz. The Pt and 1.2-μm-thick PZT layers were etched off to prepare Pt top electrode etched samples or Pt/PZT stack etched samples. In the case of bipolar measurement, the top electrode diameter did not affect ferroelectric properties, while the maximum displacement of the butterfly-shaped hysteresis curve, related with piezoelectric response, increased with decreasing top-electrode diameter. On the other hand, the longitudinal piezoelectric constant, AFM d33, calculated from the strain curve slope at 5 Hz, +5 V, increased with decreasing top-electrode diameter. The average value of the Pt/PZT stack-etched AFM d33 almost equals that of Pt-etched AFM d33. Average AFM d33 of the 8-μm-diameter Pt-etched and Pt/PZT stack-etched samples are 129 and 135 pm/V, respectively.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 748: Symposium U – Ferroelectric Thin Films XI , 2002 , U14.2
Copyright
Copyright © Materials Research Society 2003

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References

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