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Ultrasound Emission from Porous Silicon: Efficient Thermoacoustic Function as a Depleted Nanocrystalline System

Published online by Cambridge University Press:  09 August 2011

N. Koshida ,
T. Nakajima ,
M. Yoshiyama ,
K. Ueno ,
T. Nakagawa  and
H. Shinoda
N. Koshida
Affiliation:
Faculty of Technology, Tokyo University of A&T, Naka-cho, Koganei, Tokyo, 184, Japan
T. Nakajima
Affiliation:
Faculty of Technology, Tokyo University of A&T, Naka-cho, Koganei, Tokyo, 184, Japan
M. Yoshiyama
Affiliation:
Faculty of Technology, Tokyo University of A&T, Naka-cho, Koganei, Tokyo, 184, Japan
K. Ueno
Affiliation:
Faculty of Technology, Tokyo University of A&T, Naka-cho, Koganei, Tokyo, 184, Japan
T. Nakagawa
Affiliation:
Faculty of Technology, Tokyo University of A&T, Naka-cho, Koganei, Tokyo, 184, Japan
H. Shinoda
Affiliation:
Faculty of Technology, Tokyo University of A&T, Naka-cho, Koganei, Tokyo, 184, Japan
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Abstract

It is demonstrated that luminescent porous silicon (PS) exhibits an efficient thermoacoustic effect owing to its extremely low thermal conductivity. The experimental device is composed of a patterned thin Al film electrode (30 nm thick), a microporous PS layer (10–50 μm thick), and a single-crystalline Si (c-Si) wafer. The PS layer was formed by a conventional anodization technique. When an electrical input is provided to the Al electrode as a sinusoidal current followed by Joule's heating, a significant acoustic pressure is produced in front of the device as a result of an efficient heat exchange between PS and air. The output amplitude is in inverse proportion to the square root of the input frequency (0.1-100 kHz) as predicted by a theoretical analysis. The observed effect is a novel useful function of PS as a completely depleted nanocrystalline system.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 536: Symposium F – Microcrystalline & Nanocrystalline Semiconductors - 1998 , 1998 , 105
Copyright
Copyright © Materials Research Society 1999

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