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X-Ray Grazing Angle Scattering and Fluorescence Studies of Interfacial Microstructures in Si1-xGex/Si Multilayers

Published online by Cambridge University Press:  25 February 2011

Z. H. Ming ,
A. Krol ,
Y. L. Soo ,
Y. H. Kao ,
J. S. Park  and
K. L. Wang
Z. H. Ming
Affiliation:
State University of New York at Buffalo, Buffalo, NY 14260
A. Krol
Affiliation:
State University of New York at Buffalo, Buffalo, NY 14260
Y. L. Soo
Affiliation:
State University of New York at Buffalo, Buffalo, NY 14260
Y. H. Kao
Affiliation:
State University of New York at Buffalo, Buffalo, NY 14260
J. S. Park
Affiliation:
University of California at Los Angeles, Los Angeles, CA 90024
K. L. Wang
Affiliation:
University of California at Los Angeles, Los Angeles, CA 90024
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Abstract

Angular dependence of grazing incidence x-ray scattering and Ge fluorescence yield were measured for the heterostructures of Si1-xGex/Si and the inverted bilayer Si/Si1-xGex as well as two 10-period superlattices. Interfacial roughness, correlation of height fluctuations between interfaces and Ge density profiles in the multilayers were investigated.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 280: Symposium B – Evolution of Surface and Thin Film Microstructure , 1992 , 261
Copyright
Copyright © Materials Research Society 1993

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References

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