Published online by Cambridge University Press: 21 February 2011
MnAs thin films grown on GaAs (001) substrates by molecular beam epitaxy have been studied by grazing incidence x-ray scattering (GIXS), x-ray diffraction (XRD) and extended x-ray absorption fine structure (EXAFS). Microstructures in films prepared with different first-layer growth conditions (template effects) are compared in terms of the interfacial roughness, lattice constants, epilayer thickness, local environment surrounding the Mn atoms, coordination number, and local disorder. The template effects are found to cause significant differences in the local structures and crystallinity of MnAs epitaxial layers.