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ZITO (ZnO-SnO2-In2O3 ) Transparent Conducting Oxides: Electrical and Optical Properties of DC Magnetron Sputtered Films

Published online by Cambridge University Press:  26 February 2011

Cleva Ow-Yang ,
Hyo-Yong Yeom ,
Burag Yaglioglu  and
David C. Paine
Cleva Ow-Yang
Affiliation:
cleva@sabanciuniv.edu, Sabanci University, Faculty of Engineering & Natural Sciences, Orhanli, Tuzla, Istanbul, 34956, Turkey, +90 216 483 9592, +90 216 483 9550
Hyo-Yong Yeom
Affiliation:
Hyo-Young_Yeom@Brown.edu, Brown University, Division of Engineering, United States
Burag Yaglioglu
Affiliation:
burag_yaglioglu@brown.edu, Brown University, Division of Engineering, United States
David C. Paine
Affiliation:
david_paine@brown.edu, Brown University, Division of Engineering, United States
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Abstract

Amorphous ZITO films were deposited by dc magnetron sputtering onto glass substrates from ceramic oxide targets containing Zn:In:Sn cation ratios of 1:2:1 and 1:2:1.5. The microstructure, carrier density, mobility, and resistivity of as-deposited and annealed samples were evaluated using x-ray diffraction and Hall effect measurements. The as-deposited films were amorphous and remained so after annealing at 200°C in air for up to five hours. Transmissivity of the films exceeded 80% in the visible spectral region. The minimum resistivity value (7.6×10−4 Ω-cm) was obtained from thin films deposited using the 1:2:1 composition target and a substrate temperature of 300°C.

Keywords

transparent conductorelectrical propertiesoptical properties
Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 905: Symposium DD – Materials for Transparent Electronics , 2005 , 0905-DD01-07
Copyright
Copyright © Materials Research Society 2006

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