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D-59 Spatially Resolved Determination of Stress in Thin Films and Devices from Curvature Measurements

Published online by Cambridge University Press:  20 May 2016

N. Herres
N. Herres
Affiliation:
Interstate University of Applied Sciences, Buchs, Switzerland
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Abstract

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Type
Denver X-Ray Conference
Information
Powder Diffraction , Volume 24 , Special Issue 2 , June 2009 , pp. 171
Copyright
Copyright © Cambridge University Press 2009

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