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D085 Synchrotron X-ray Study of Structural Phase Transformations in Continuous and Patterned Ge2Sb2Te5 Phase-Change Material Thin Films

Published online by Cambridge University Press:  20 May 2016

J.L. Jordan-Sweet
Affiliation:
IBM T.J. Watson Research Center, Yorktown Heights, NY
S.M. Rossnagel
Affiliation:
IBM T.J. Watson Research Center, Yorktown Heights, NY
P.M. Mooney
Affiliation:
IBM T.J. Watson Research Center, Yorktown Heights, NY
S. Raoux
Affiliation:
IBM Almaden Research Center, San Jose, CA
C.T. Rettner
Affiliation:
IBM Almaden Research Center, San Jose, CA

Abstract

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Type
Denver X-Ray Conference
Copyright
Copyright © Cambridge University Press 2005

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